Electrical Characterization of Silicon-on-Insulator Materials and Devices

  • Sorin Cristoloveanu
  • Sheng S. Li

Table of contents

  1. Front Matter
    Pages i-xv
  2. Sorin Cristoloveanu, Sheng S. Li
    Pages 1-6
  3. Sorin Cristoloveanu, Sheng S. Li
    Pages 7-44
  4. Sorin Cristoloveanu, Sheng S. Li
    Pages 45-86
  5. Sorin Cristoloveanu, Sheng S. Li
    Pages 87-117
  6. Sorin Cristoloveanu, Sheng S. Li
    Pages 119-143
  7. Sorin Cristoloveanu, Sheng S. Li
    Pages 145-184
  8. Sorin Cristoloveanu, Sheng S. Li
    Pages 185-207
  9. Sorin Cristoloveanu, Sheng S. Li
    Pages 209-273
  10. Sorin Cristoloveanu, Sheng S. Li
    Pages 275-336
  11. Sorin Cristoloveanu, Sheng S. Li
    Pages 337-373
  12. Back Matter
    Pages 375-381

About this book

Introduction

Silicon on Insulator is more than a technology, more than a job, and more than a venture in microelectronics; it is something different and refreshing in device physics. This book recalls the activity and enthu­ siasm of our SOl groups. Many contributing students have since then disappeared from the SOl horizon. Some of them believed that SOl was the great love of their scientific lives; others just considered SOl as a fantastic LEGO game for adults. We thank them all for kindly letting us imagine that we were guiding them. This book was very necessary to many people. SOl engineers will certainly be happy: indeed, if the performance of their SOl components is not always outstanding, they can now safely incriminate the relations given in the book rather than their process. Martine, Gunter, and Y. S. Chang can contemplate at last the amount of work they did with the figures. Our SOl accomplices already know how much we borrowed from their expertise and would find it indecent to have their detailed contri­ butions listed. Jean-Pierre and Dimitris incited the book, while sharing their experience in the reliability of floating bodies. Our families and friends now realize the SOl capability of dielectrically isolating us for about two years in a BOX. Our kids encouraged us to start writing. Our wives definitely gave us the courage to stop writing. They had a hard time fighting the symptoms of a rapidly developing SOl allergy.

Keywords

Diode electronics material microelectronics transistor Wafer

Authors and affiliations

  • Sorin Cristoloveanu
    • 1
  • Sheng S. Li
    • 2
  1. 1.Polytechnic Institute of GrenobleFrance
  2. 2.University of FloridaUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4615-2245-4
  • Copyright Information Kluwer Academic Publishers 1995
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-0-7923-9548-5
  • Online ISBN 978-1-4615-2245-4
  • Series Print ISSN 0893-3405
  • About this book