Book 2014

Atomic Layer Deposition for Semiconductors

Editors:

ISBN: 978-1-4614-8053-2 (Print) 978-1-4614-8054-9 (Online)

Table of contents (10 chapters)

  1. Front Matter

    Pages i-x

  2. Introduction

    1. Front Matter

      Pages 1-1

    2. No Access

      Chapter

      Pages 3-12

      Introduction

  3. Fundamentals

    1. Front Matter

      Pages 13-13

    2. No Access

      Chapter

      Pages 15-46

      ALD Precursors and Reaction Mechanisms

    3. No Access

      Chapter

      Pages 47-69

      ALD Simulations

  4. ALD for Memory Devices

    1. Front Matter

      Pages 71-71

    2. No Access

      Chapter

      Pages 73-122

      Mass-Production Memories (DRAM and Flash)

    3. No Access

      Chapter

      Pages 123-148

      PCRAM

    4. No Access

      Chapter

      Pages 149-171

      FeRAM

  5. ALD for Logic Devices

    1. Front Matter

      Pages 173-173

    2. No Access

      Chapter

      Pages 175-208

      Front End of the Line Process

    3. No Access

      Chapter

      Pages 209-238

      Back End of the Line

  6. ALD Machines

    1. Front Matter

      Pages 239-239

    2. No Access

      Chapter

      Pages 241-255

      ALD Machines

  7. No Access

    Chapter

    Pages E1-E1

    Erratum to: Atomic Layer Deposition for Semiconductors

  8. Back Matter

    Pages 257-263