Book 2014

Design for Manufacturability

From 1D to 4D for 90–22 nm Technology Nodes

Authors:

ISBN: 978-1-4614-1760-6 (Print) 978-1-4614-1761-3 (Online)

Table of contents (5 chapters)

  1. Front Matter

    Pages i-viii

  2. No Access

    Chapter

    Pages 1-9

    Preface

  3. No Access

    Chapter

    Pages 11-102

    Classic DfM: From 2D to 3D

  4. No Access

    Chapter

    Pages 103-203

    DfM at 28 nm and Beyond

  5. No Access

    Chapter

    Pages 205-271

    New DfM Domain: Stress Effects

  6. No Access

    Chapter

    Pages 273-273

    Closure and Future Work

  7. Back Matter

    Pages 275-278