Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications

  • Koji Sugioka
  • Ya Cheng

Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)

Table of contents

  1. Front Matter
    Pages i-ix
  2. Koji Sugioka, Ya Cheng
    Pages 1-6
  3. Koji Sugioka, Ya Cheng
    Pages 19-33
  4. Koji Sugioka, Ya Cheng
    Pages 35-48
  5. Koji Sugioka, Ya Cheng
    Pages 49-55
  6. Koji Sugioka, Ya Cheng
    Pages 57-73
  7. Koji Sugioka, Ya Cheng
    Pages 75-87
  8. Koji Sugioka, Ya Cheng
    Pages 89-103
  9. Koji Sugioka, Ya Cheng
    Pages 105-123
  10. Koji Sugioka, Ya Cheng
    Pages 125-129

About this book


Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfludics, micromechanics, microelectronics, and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfludic, optofludic, and lab-on-a-chip devices, and thereby many researches on this topic are currently being carried out.
This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfludics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent, and practical applications to biochemical analysis.


Femtosecond Laser Laser Materials Processing Microfabrication Microfluidics Optofluidics

Authors and affiliations

  • Koji Sugioka
    • 1
  • Ya Cheng
    • 2
  1. 1.Laser Technology LaboratoryRIKENSaitamaJapan
  2. 2.State Key Laboratory of High Field LaserShanghai Institute of Optics and Fine MeShanghaiPeople's Republic of China

Bibliographic information

  • DOI
  • Copyright Information The Author(s) 2014
  • Publisher Name Springer, London
  • eBook Packages Engineering Engineering (R0)
  • Print ISBN 978-1-4471-5540-9
  • Online ISBN 978-1-4471-5541-6
  • Series Print ISSN 2191-530X
  • Series Online ISSN 2191-5318
  • Buy this book on publisher's site