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Strain Effect in Semiconductors

Theory and Device Applications

  • Yongke Sun
  • Scott E. Thompson
  • Toshikazu Nishida

Table of contents

  1. Front Matter
    Pages 1-10
  2. Yongke Sun, Toshikazu Nishida, Scott E. Thompson
    Pages 1-6
  3. Band Structures of Strained Semiconductors

    1. Front Matter
      Pages 8-8
    2. Yongke Sun, Toshikazu Nishida, Scott E. Thompson
      Pages 9-21
    3. Yongke Sun, Toshikazu Nishida, Scott E. Thompson
      Pages 23-49
    4. Yongke Sun, Toshikazu Nishida, Scott E. Thompson
      Pages 51-135
    5. Yongke Sun, Toshikazu Nishida, Scott E. Thompson
      Pages 137-182
  4. Transport Theory of Strained Semiconductors

    1. Front Matter
      Pages 184-184
    2. Yongke Sun, Toshikazu Nishida, Scott E. Thompson
      Pages 185-232
  5. Strain in Semiconductor Devices

    1. Front Matter
      Pages 234-234
    2. Yongke Sun, Toshikazu Nishida, Scott E. Thompson
      Pages 235-266
    3. Yongke Sun, Toshikazu Nishida, Scott E. Thompson
      Pages 267-290
    4. Yongke Sun, Toshikazu Nishida, Scott E. Thompson
      Pages 291-325
  6. Back Matter
    Pages 1-23

About this book

Introduction

Strain Effect in Semiconductors: Theory and Device Applications presents the fundamentals and applications of strain in semiconductors and semiconductor devices that is relevant for strain-enhanced advanced CMOS technology and strain-based piezoresistive MEMS transducers. The book discusses relevant applications of strain while also focusing on the fundamental physics as they pertain to bulk, planar, and scaled nano-devices. Lead authors Yongke Sun, Scott Thompson and Toshikazu Nishida also:

  • Treat strain physics at both the qualitative overview level as well as provide detailed fundamentals
  • Explain strain physics relevant to logic devices as well as strain-based MEMS

This book is relevant to current strained Si logic technology, as well as for understanding the physics and scaling of future strain nano-scale devices. It is perfect for practicing device engineers at semiconductor manufacturers, as well as graduate students studying device physics at universities.

 

Keywords

CMOS technology Semiconductor Sensor fundamental physics logic devices microelectromechanical system (MEMS) optoelectronic devices strain effect strain physics strain-based MEMS

Authors and affiliations

  • Yongke Sun
    • 1
  • Scott E. Thompson
    • 2
  • Toshikazu Nishida
    • 3
  1. 1.Dept. Electrical & Computer EngineeringUniversity of FloridaGainesvilleU.S.A.
  2. 2.Dept. Electrical & Computer EngineeringUniversity of FloridaGainesvilleU.S.A.
  3. 3.Dept. Electrical &University of FloridaGainesvilleU.S.A.

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4419-0552-9
  • Copyright Information Springer Science+Business Media, LLC 2010
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering
  • Print ISBN 978-1-4419-0551-2
  • Online ISBN 978-1-4419-0552-9
  • Buy this book on publisher's site