Book 2007

Micromanufacturing

International Research and Development

ISBN: 978-1-4020-5948-3 (Print) 978-1-4020-5949-0 (Online)

Table of contents (7 chapters)

  1. Front Matter

    Pages i-xxxiv

  2. No Access

    Chapter

    Pages 1-9

    Introduction

  3. No Access

    Chapter

    Pages 11-28

    Design

  4. No Access

    Chapter

    Pages 29-52

    Materials

  5. No Access

    Chapter

    Pages 53-87

    Processes

  6. No Access

    Chapter

    Pages 89-109

    Metrology, Sensors and Control

  7. No Access

    Chapter

    Pages 111-120

    Non-lithography Applications

  8. No Access

    Chapter

    Pages 121-130

    Business, Education, the Environment, and Other Issues

  9. Back Matter

    Pages 131-362