Smart Sensors and MEMS

  • Sergey Y. Yurish
  • Maria Teresa S. R. Gomes

Part of the NATO Science Series book series (NAII, volume 181)

Table of contents

  1. Front Matter
    Pages i-xv
  2. Sergey Y. Yurish, Nikolay V. Kirianaki
    Pages 51-90
  3. Fabien Josse, Richard W. Cernosek
    Pages 91-123
  4. Elke Mackensen, Leonhard Reindl
    Pages 155-202
  5. Pavel Ripka
    Pages 203-228
  6. Radivoje S. Popovic, Giovanni Boero, Pierre-Andre Besse
    Pages 229-253
  7. Ulrich Mescheder
    Pages 255-272
  8. Dmytro Fedasyuk, Volodymyr Makar
    Pages 289-329
  9. P. G. Datskos, N. V. Lavrik, M. J. Sepaniak
    Pages 331-379
  10. P. G. Datskos, N. V. Lavrik
    Pages 381-419
  11. Maria Teresa S. R. Gomes
    Pages 421-445
  12. Back Matter
    Pages 475-480

About these proceedings


The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book.

It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS.

The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.


biosensor detector electronics hybrid systems material microelectromechanical system (MEMS) microelectronics physics sensor signal processing

Editors and affiliations

  • Sergey Y. Yurish
    • 1
  • Maria Teresa S. R. Gomes
    • 2
  1. 1.National University Lviv PolytechnicUkraine
  2. 2.University of AveiroPortugal

Bibliographic information

  • DOI
  • Copyright Information Springer 2004
  • Publisher Name Springer, Dordrecht
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4020-2928-8
  • Online ISBN 978-1-4020-2929-5
  • Series Print ISSN 1568-2609
  • Buy this book on publisher's site