Dynamics of Microelectromechanical Systems

  • Nicolae Lobontiu
Book

Part of the Microsystems book series (MICT, volume 17)

Table of contents

About this book

Introduction

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

  • An in-depth treatment of problems that involve reliable modeling, analysis and design,

  • Analytical models with correct dependences on service dimensions,

  • Cantilever based systems for nanofabrication researchers and designers, and

  • Dynamics of complex spring and beam microsystems.

Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

Keywords

Dynamics Electrical Lobontiu MEMS Micro Nano Vibrations design frequency-domain analysis impedance mechanical-electrical analogy mechanics microelectromechanical system (MEMS) modeling substrate losses

Authors and affiliations

  • Nicolae Lobontiu
    • 1
  1. 1.University of Alaska AnchorageUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-0-387-68195-5
  • Copyright Information Springer-Verlag US 2007
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering
  • Print ISBN 978-0-387-36800-9
  • Online ISBN 978-0-387-68195-5
  • Series Print ISSN 1389-2134
  • Buy this book on publisher's site