Introductory MEMS

Fabrication and Applications

  • Thomas M. Adams
  • Richard A. Layton

Table of contents

  1. Front Matter
    Pages i-xiii
  2. Fabrication

    1. Front Matter
      Pages 1-1
    2. Thomas M. Adams, Richard A. Layton
      Pages 3-16
    3. Thomas M. Adams, Richard A. Layton
      Pages 17-63
    4. Thomas M. Adams, Richard A. Layton
      Pages 65-94
    5. Thomas M. Adams, Richard A. Layton
      Pages 95-130
    6. Thomas M. Adams, Richard A. Layton
      Pages 131-153
  3. Applications

    1. Front Matter
      Pages 155-155
    2. Thomas M. Adams, Richard A. Layton
      Pages 157-165
    3. Thomas M. Adams, Richard A. Layton
      Pages 167-210
    4. Thomas M. Adams, Richard A. Layton
      Pages 211-230
    5. Thomas M. Adams, Richard A. Layton
      Pages 231-253
    6. Thomas M. Adams, Richard A. Layton
      Pages 255-282
    7. Thomas M. Adams, Richard A. Layton
      Pages 283-316
    8. Thomas M. Adams, Richard A. Layton
      Pages 317-368
  4. Microfabrication laboratories

    1. Front Matter
      Pages 369-369
  5. Laboratories

    1. Thomas M. Adams, Richard A. Layton
      Pages 371-403
  6. Back Matter
    Pages 1-37

About this book

Introduction

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.

Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

 

Keywords

PED Sensor integrated circuit mechanics metal-oxide-semiconductor transistor microelectromechanical system (MEMS)

Authors and affiliations

  • Thomas M. Adams
    • 1
  • Richard A. Layton
    • 2
  1. 1.Dept. Mechanical EngineeringRose-Hulman Institute of TechnologyTerre HauteU.S.A.
  2. 2.Dept. Mechanical EngineeringRose-Hulman Institute of TechnologyTerre HauteU.S.A.

Bibliographic information

  • DOI https://doi.org/10.1007/978-0-387-09511-0
  • Copyright Information Springer Science+Business Media, LLC 2010
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering
  • Print ISBN 978-0-387-09510-3
  • Online ISBN 978-0-387-09511-0
  • About this book