Ozone-Generation Panel with an Atmospheric Dielectric Barrier Discharge

Abstract

For small-scale discharge panels of volume-dielectric barrier discharge (V-DBD) and surface-DBD (S-DBD) with an Al₂O₃-ceramic dielectric layer and a sinusoidal alternating current (AC)-voltage at a frequency of 55 kHz, the plasma and the ozone densities in the discharge area are estimated by analyzing the I-V (current and voltage) characteristics and ozone measuring the concentration in a liter-scale container. With a plasma current in the range of 10–20 mA, the plasma density is n_p ∼ (10¹⁸−10¹⁹)m⁻³ for the V-DBD and n_p ∼ (10¹⁷−10¹⁸)m⁻³ for the S-DBD, irrespective of environmental temperature. However, the ozone density generated on DBD is strongly affected by the electrode temperature and is reduced as the environmental temperature is increased. At an environmental temperature as low as 10 °C, the ozone density generated on the V-DBD is as low as n(O₃) ∼ (10¹⁷−10¹⁸)m⁻³ with a high electrode temperature of more than 100 °C; on the other hand, the ozone density on the S-DBD is n(O₃) ∼ (10¹⁹−10²⁰)m⁻³ with a low electrode temperature of ∼30 °C, which is higher by an order of 10² than the plasma density on the S-DBD plasma panel.