Abstract
The performance test of a laboratory based ambient pressure X-ray photoelectron spectroscopy (AP-XPS) system at the Gwangju Institute of Science and Technology (GIST) was carried out. The system, consisted of a Scienta R4000 HiPP-3 electron analyzer and a monochromatized Al Kα X-ray source, is designed to operate a gas pressure of up to 25 Torr. An Al polyimide X-ray window is used to isolate the X-ray source from the back-filled-type ambient pressure measurement chamber. Two modes of XPS operations were tested, a one-dimensional chemical imaging mode and a transmission mode. In the transmission mode, the lens voltage of analyzer was optimized for maximum detection of photo-excited electrons under elevated pressure condition, i.e., a typical standard lens operation mode. On the other hand, in the imaging mode, spatial information on the outgoing electrons is conserved to generate a one-dimensional chemical image of surface being measured. The test of the imaging mode on a Au/Si reference sample showed a spatial resolution of ∼10 µm under an Ar gas pressure of 500 mTorr. With the superb design of the differential pump and the electron transfer optics, a good signal-to-noise ratio was obtained for the XPS core-level spectra at Ar gas pressure up to 1 Torr.
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Acknowledgments
This study is supported in part by Basic Science Research Program through grants from the National Research Foundation of Korea (NRF) funded by the Korean Government (MOE) (NRF- 2019R1A2C2008052). B. S. Mun would like to acknowledge the support from SRC (C-AXS, NRF-2015R1A5A1009962) and the GRI (GIST Research Institute) Project through a grant provided by GIST in 2019.
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Lim, H., Yu, Y., Kim, D. et al. Performance Test of a Laboratory-Based Ambient Pressure X-ray Photoelectron Spectroscopy System at the Gwangju Institute of Science and Technology. J. Korean Phys. Soc. 75, 541–546 (2019). https://doi.org/10.3938/jkps.75.541
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DOI: https://doi.org/10.3938/jkps.75.541