Abstract
This paper reports the deposition of a metal line using a multilayer stack and laser-induced forward transfer (LIFT) using a low cost continuous wave blue laser with a wavelength of 450 nm. The donor structure was composed of a light-to-heat (LTH) layer, a release layer, and a transfer layer in series. Amorphous silicon as the LTH layer absorbs photon energy and converts it to heat. A release layer was melted so that a silver transfer layer would be transferred to the receiver substrate. The transferred silver layer showed reasonable physical and electrical characteristics. A low cost fine linewidth metal layer could be achieved using this modified LIFT technique and blue laser.
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J. Bohandy, B. F. Kim and F. J. Adrian, Journal of Applied Physics 60, 1538 (1986).
M. Zenou, A. Sa’ar and Z. Kotler, small 11, 4082 (2015).
Z. Kántor, Z. Tóth and T. Szörényi, Applied Physics Letters, 64, 3506 (1994).
I. Zergiotia, S. Mailisa, N. A. Vaionosa, C. Fotakisa, S. Chenb and C. P. Grigorpoulosb, Applied Surface Science 127-129, 601 (1998).
M. L. Tseng, C. M. Chang, B. H. Chen, Y. W. Huang, C. H. Chu et al., Nanotechnology 23, 444013 (2012).
C. Constantinescu, A. K. Diallo, L. Rapp, P. Cremillieu, R. Mazurczyk et al., Applied Surface Science, 336, 11 (2015).
L. Rapp, A. K. Diallo, A. P. Alloncle, C. Videlot-Ackemann, F. Fages and P. Delaporte, Applied Physics Letters 95, 171109 (2009).
M. Zenou, A. Sa’ar and Z. Kotler, Journal of Physics D: Applied Physics 48, 205303 (2015).
A. I. Kuznetsov, R. Kiyan and B. N. Chichkov, Optical Society of America 18, 21198 (2010).
Z. Galazka, R. Uecker and R. Fornari, Journal of Crystal Growth 388, 61 (2014).
J. López-Vidrier, S. Lauzurica, D. Canteli and M. Lluscà, Journal of Luminescence 185, 112 (2017).
P. B. Johnson and R. W. Christy, Phys. Rev. B 6, 4370 (1972).
W. S. M. Werner, K. Glantschnig and C. Ambrosch-Draxl, Journal of Physical and Chemical Reference Date 38, 1013 (2009).
M. A. Ordal, R. J. Bell, R. W. Alexander, L. A. Newquist and M. R. Querry, Applied Optics 27, 1203 (1988).
D. T. Pierce and W. E. Spicer, Phys. Rev. B 5, 3017 (1972).
M. R. Querry, Optical constants of minerals and other materials from the millimeter to the ultraviolet (1987).
K. M. McPeak, S. V. Jayanti, S. J. P. Kress, S. Meyer, S. lotti et al., ACS Photonics 2, 326 (2015).
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Cheon, J., Nguyen, MC., Nguyen, A.HT. et al. Deposition of Fine Linewidth Silver Layer using a Modified Laser-induced Forward Transfer Technique. J. Korean Phys. Soc. 73, 1279–1282 (2018). https://doi.org/10.3938/jkps.73.1279
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DOI: https://doi.org/10.3938/jkps.73.1279