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A carbon contamination cleaning of gold film by electron beam irradiation with minimum structural damages

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Abstract

We demonstrate a successful removal of carbon contamination in gold surface simply by exposing relatively low energy electron emitted from field effect scanning electron microscope apparatus. An atomic force microscope image of gold film taken after a few tens of minute exposure of electron beam indicates small morphology change, however, a lateral force microscope image taken simultaneously shows a considerable increase of surface potential, which suggest an effective change of atomic composition between gold and other contaminant atoms as carbon. Energy-dispersive X-ray spectroscopy confirms that the carbon composition is substantially decreased due to electron beam exposure.

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Authors and Affiliations

  1. Department of Physics, Hallym University, Chuncheon, 24252, Korea

    D. J. Park

  2. Department of Physics, Seoul National University, Seoul, 08826, Korea

    T. H. Kang & D. S. Kim

  3. Department of Physics, Incheon National University, Incheon, 22012, Korea

    H. T. Kim & S. B. Choi

Authors
  1. D. J. Park
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  2. T. H. Kang
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  3. D. S. Kim
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  4. H. T. Kim
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  5. S. B. Choi
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Corresponding author

Correspondence to S. B. Choi.

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Park, D.J., Kang, T.H., Kim, D.S. et al. A carbon contamination cleaning of gold film by electron beam irradiation with minimum structural damages. Journal of the Korean Physical Society 71, 467–470 (2017). https://doi.org/10.3938/jkps.71.467

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  • DOI: https://doi.org/10.3938/jkps.71.467

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