Generation of a medium vacuum pressure by using two different pumping methods in the KRISS dynamic flow-control system

Abstract

Pumping systems with large vacuum chambers have numerous applications in the process industry: for example, mixing of various types of gases as in the semiconductor industry, the calibration of vacuum gauges, the measurement of outgassing rates of various materials in the field of space technology, etc. Most often, these systems are used in the medium vacuum range (10⁻¹ Pa–10² Pa) and in the dynamically-generated pressure mode. We have designed and developed a new dynamic flow system at the KRISS (Korea Research Institute of Standards and Science) that can be used for such applications with reliability in the range from 0.1 Pa – 133 Pa. In this report, the design philosophy, operational procedure and experimental data for the generated stable pressure points in the chamber of the system are discussed. The data consist the pressure points generated in the medium vacuum range while pumping the chamber of the system by using two different methods: first by using a dry scroll pump and then by using a combination of a turbomolecular pump backed by the same scroll pump. The relative standard deviations in the pressure points were calculated and were found to be greater than 1.5% for the scroll pump and less than 0.5% for the turbomolecular pump.