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Fabrication and characterization of nanopatterned LaAlO3/SrTiO3 heterostructures

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Abstract

We report the fabrication of nanopatterned conduction channels and electrical transport of a two-dimensional electron gas formed at a LaAlO3/SrTiO3 heterointerface. The nanoscale channels are formed by electron beam lithography and Ar-ion etching. The negative magnetoconductance data observed at low temperature are attributed to the weak antilocalization effect due to the strong spin-orbit interaction inherent in the electron gas at the heterointerface whereas the conductance fluctuations are caused by quantum interference between the electron wavefunctions. The gatedependent characteristic parameters, obtained using the Maekawa-Fukuyama model, reveal that the spin-orbit interaction in the nanopatterned metal-oxide heterostructure is gate-tunable, which will be useful for building spintronic devices.

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Authors and Affiliations

  1. Korea Research Institute of Standards and Science, Daejeon, 305-600, Korea

    Jung-Won Chang & Joon Sung Lee

  2. Department of Display and Semiconductor Physics, Korea University Sejong Campus, Sejong, 339-700, Korea

    Jung-Won Chang & Joon Sung Lee

  3. Department of Physics, Chungnam National University, Daejeon, 305-764, Korea

    Jong Hyun Song & Sang Keun Seung

  4. Korea Research Institute of Standards and Science, Daejeon, 305-600, Korea

    Hyunho Noh

  5. Department of Display and Semiconductor Physics, Korea University Sejong Campus, Sejong, 339-700, Korea

    Soon Gul Lee & Yong-Joo Doh

  6. Korea Research Institute of Standards and Science, Daejeon, 305-600, Korea

    Lkhagvasuren Baasandorj & Jinhee Kim

  7. University of Science and Technology, Daejeon, 305-333, Korea

    Lkhagvasuren Baasandorj & Jinhee Kim

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  1. Jung-Won Chang
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  2. Joon Sung Lee
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  7. Yong-Joo Doh
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  9. Jinhee Kim
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Correspondence to Yong-Joo Doh.

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Chang, JW., Lee, J.S., Song, J.H. et al. Fabrication and characterization of nanopatterned LaAlO3/SrTiO3 heterostructures. Journal of the Korean Physical Society 63, 236–240 (2013). https://doi.org/10.3938/jkps.63.236

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  • DOI: https://doi.org/10.3938/jkps.63.236

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