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The relationship between the Pi-coefficient and the temperature for the (111) silicon surface

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Abstract

In this work, we performed an extensive experimental study on temperature dependence of the piezoresistive behavior of silicon. For the precise measurement of stress, we derived the expressions for the relationship between the pi-coefficients versus temperature. Also, the relationship was observed to be in good agreement with the calibration results over the temperature range -133 to 100 °C for test chips fabricated on the (111) silicon surface.

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References

  1. Y. Kanda, IEEE Trans. Electron. Devices 29, 64 (1982).

    Article  Google Scholar 

  2. K. Matsuda, J. Appl. Phys. 73, 1838 (1993).

    Article  ADS  Google Scholar 

  3. E. Lund and T. Finstad, Adv. Electron. Packag. 1, 215 (1999).

    Google Scholar 

  4. D. A. Bittle, J. C. Suhling, R. E. Beaty, R. C. Jaeger and R. W. Johnson, J. Electron. Packag. 113, 203 (1991).

    Article  Google Scholar 

  5. K. Narayan, K. Behdinan and Z. Fawaz, J. Mater. Process. Technol. 182, 387 (2007).

    Article  Google Scholar 

  6. C. Cho, R. C. Jaeger and J. C. Suhling, J. Korean Phys. Soc. 52, 612 (2008).

    Article  ADS  Google Scholar 

  7. C. Cho, J. Korean Phys. Soc. 53, 662 (2008).

    Article  ADS  Google Scholar 

  8. C. Cho, R. C. Jaeger, J. C. Suhling, Y. Kang and A. Mian, IEEE Sens. J. 8, 392 (2008).

    Article  Google Scholar 

  9. C. Cho, R. C. Jaeger and J. C. Suhling, IEEE Sens. J. 8, 1455 (2008).

    Article  Google Scholar 

  10. A. Mian, J. C. Suhling and R. C. Jaeger, IEEE Sensors J. 6, 340 (2006).

    Article  Google Scholar 

  11. R. E. Beaty, R. C. Jaeger, J. C. Suhling, R. W. Johnson and R. D. Butler, IEEE T. Compon. Hybr. 15, 904 (1992).

    Article  Google Scholar 

  12. F. J. Morin, T. H. Geballe and C. Herring, Phys. Rev. 10, 525 (1956).

    Google Scholar 

  13. C. Herring, Bell System Tech. J. 34, 237 (1955).

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Electronic & Electrical Engineering, College of Science and Technology, Hongik University, Sejong, 339-701, Korea

    Chun-Hyung Cho

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  1. Chun-Hyung Cho
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Correspondence to Chun-Hyung Cho.

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Cho, CH. The relationship between the Pi-coefficient and the temperature for the (111) silicon surface. Journal of the Korean Physical Society 63, 2029–2033 (2013). https://doi.org/10.3938/jkps.63.2029

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  • DOI: https://doi.org/10.3938/jkps.63.2029

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