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Cost-effective, large-area, reusable nanoimprint molds for polymer nanostructures

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Abstract

In this paper, we report the use of a heptadeca-fluoro-1,1,2,2 tetrahydrodecyl trichlorosilane (HDFS)-coated anodic aluminum oxide (AAO) template as a low-cost, large-area, reusable nanoimprint mold. Coating AAO with HDFS increases the water contact angle (CA) from 20° on a pristine AAO to 120° on an HDFS-coated AAO, thus lowering adhesion of the AAO mold. Nanostructured polydimethylsiloxane (PDMS) could then be easily obtained by using the direct imprinting method on HDFS-coated AAO without any external loads. After nanoimprinting with an HDFS-coated AAO mold, the CA of the mold rarely changes (120° to 115°), thus demonstrating the possibility of a reusable AAO mold. The CA of PDMS increases up to ∼15° after nanoimprinting, and its transmittance decreases by 5 ∼ 30%, compared with that of a flat PDMS film, in the full visible range due to the scattering effect, which implies that the optical pathway of incident light could be extended in the nanostructured polymer. Therefore, our nanoimprinting method is expected to enable a variety of applications in next-generation soft optoelectronics.

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References

  1. S. Zankovych, T. Hoffmann, J. Seekamp, J-U. Bruch and C. M. S. Torres, Nanotechnology 12, 91 (2001).

    Article  ADS  Google Scholar 

  2. S. H. Ahn and L. J. Guo, Adv. Mater. 20, 2044 (2008).

    Article  Google Scholar 

  3. H. J. Lim, J. J. Lee, S. Park, K-B. Choi, G. H. Kim, H. H. Park and J. H. Ryu, J. Nanosci. Nanotechnol. 12, 5489 (2012).

    Article  Google Scholar 

  4. F. Hua, Y. Sun, A. Gaur, M. A. Meitl, L. Bilhaut, L. Rotkina, J. Wang, Phil Geil, M. Shim and J. A. Rogers, Nano Lett. 4, 2467 (2004).

    Article  ADS  Google Scholar 

  5. E. Bae, E. R. Kim and H. Lee, J. Korean Phys. Soc. 37, 1026 (2000).

    Article  Google Scholar 

  6. S-H. Park, T-W. Lim, J-H. Jeong, K-D. Kim, K-S. Lee, H-J. Kong and D-Y. Yang, Appl. Phys. Lett. 88, 203105 (2006).

    Article  ADS  Google Scholar 

  7. A. Revzin, R. J. Russell, V. K. Yadavalli, W-G. Koh, C. Deister, D. D. Hile, M. B. Mellott and M. V. Pishko, Langmuir 17, 5440 (2001).

    Article  Google Scholar 

  8. I. Maximov et al., Microelectron. Eng. 61, 449 (2002).

    Article  Google Scholar 

  9. H. S. Jang, G. H. Kim, J. Lee and K. B. Choi, Curr. Appl. Phys. 10, 1436 (2010).

    Article  ADS  Google Scholar 

  10. W-H. Kim, S-J. Park, J-Y. Son and H. Kim, Nanotechnology 19, 045302 (2008).

    Article  Google Scholar 

  11. Y. Lai, Z. Lin, J. Huang, L. Sun, Z. Chen and C. Lin, New J. Chem. 34, 44 (2010).

    Article  Google Scholar 

  12. H. J. Fan, W. Lee, R. Scholz, A. Dadgar, A. Krost, K. Nielsch and M. Zacharias, Nanotechnology 16, 913 (2005).

    Article  ADS  Google Scholar 

  13. X. Chen, X. Wang, Z. Wang, J. Wan, J. Liu and Y. Qian, Nanotechnology 15, 1685 (2004).

    Article  ADS  Google Scholar 

  14. Y. X. Zhuang, O. Hansen, T. Knieling, C. Wang, P. Rombach, W. Lang, W. Benecke, M. Kehlenbeck and J. Koblitz, J. Micromech. Microeng. 16, 2259 (2006).

    Article  ADS  Google Scholar 

  15. M. J. Lee, N. Y. Lee, J. R. Lim, J. B. Kim, M. Kim, H. K. Baik and Y. S. Kim, Adv. Mater. 18, 3115 (2006).

    Article  Google Scholar 

  16. L. Zaraska, G. D. Sulka and M. Jaskuła, Surf. Coat. Technol. 204, 1729 (2010).

    Article  Google Scholar 

  17. K. Nielsch, J. Choi, K. Schwirn, R. B. Wehrspohn and U. Gosele, Nano Lett. 2, 677 (2002).

    Article  ADS  Google Scholar 

  18. J-L. Wu, F-C. Chen, Y-S. Hsiao, F-C. Chien, P. Chen, C-H. Kuo, M. H. Huang and C-S. Hsu, ACS Nano 5, 959 (2011).

    Article  Google Scholar 

  19. M-G. Kang, T. Xu, H. J. Park, X. Luo and L. J. Guo, Adv. Mater. 22, 4378 (2010).

    Article  Google Scholar 

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Correspondence to Dukhyun Choi.

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Lee, S., Lee, S. & Choi, D. Cost-effective, large-area, reusable nanoimprint molds for polymer nanostructures. Journal of the Korean Physical Society 62, 373–376 (2013). https://doi.org/10.3938/jkps.62.373

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  • DOI: https://doi.org/10.3938/jkps.62.373

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