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Compact modeling of extremely scaled graphene FETs

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Abstract

In this work, compact current modeling of field-effect transistors (FETs) with transferred graphene channel grown by using chemical vapor deposition is presented. A highly-doped silicon substrate is used as a back gate, channels are defined by using electron-beam lithography, and the channel length of the transistor is scaled down to 20 nm. The DC characteristics of the scaled graphene transistors are observed by considering the source/drain series resistances. In compact modeling of graphene FETs, an electron-hole puddle existing near the charge-neutral region (Dirac point) is considered at a low carrier density while the velocity saturation effect due to surface polar phonon scattering is included at a high carrier density.

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Correspondence to Sunae Seo.

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Lee, J., Shin, H., Chung, HJ. et al. Compact modeling of extremely scaled graphene FETs. Journal of the Korean Physical Society 61, 1797–1801 (2012). https://doi.org/10.3938/jkps.61.1797

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  • DOI: https://doi.org/10.3938/jkps.61.1797

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