Performance Test of a Laboratory-Based Ambient Pressure X-ray Photoelectron Spectroscopy System at the Gwangju Institute of Science and Technology
- 41 Downloads
The performance test of a laboratory based ambient pressure X-ray photoelectron spectroscopy (AP-XPS) system at the Gwangju Institute of Science and Technology (GIST) was carried out. The system, consisted of a Scienta R4000 HiPP-3 electron analyzer and a monochromatized Al Kα X-ray source, is designed to operate a gas pressure of up to 25 Torr. An Al polyimide X-ray window is used to isolate the X-ray source from the back-filled-type ambient pressure measurement chamber. Two modes of XPS operations were tested, a one-dimensional chemical imaging mode and a transmission mode. In the transmission mode, the lens voltage of analyzer was optimized for maximum detection of photo-excited electrons under elevated pressure condition, i.e., a typical standard lens operation mode. On the other hand, in the imaging mode, spatial information on the outgoing electrons is conserved to generate a one-dimensional chemical image of surface being measured. The test of the imaging mode on a Au/Si reference sample showed a spatial resolution of ∼10 µm under an Ar gas pressure of 500 mTorr. With the superb design of the differential pump and the electron transfer optics, a good signal-to-noise ratio was obtained for the XPS core-level spectra at Ar gas pressure up to 1 Torr.
KeywordsAmbient Pressure XPS (AP-XPS) Transmission mode 1D chemical imaging mode
Unable to display preview. Download preview PDF.
This study is supported in part by Basic Science Research Program through grants from the National Research Foundation of Korea (NRF) funded by the Korean Government (MOE) (NRF- 2019R1A2C2008052). B. S. Mun would like to acknowledge the support from SRC (C-AXS, NRF-2015R1A5A1009962) and the GRI (GIST Research Institute) Project through a grant provided by GIST in 2019.
- Z. Zhongwei, Structure, Mobility, and Composition of Transition Metal Catalyst Surfaces, High-Pressure Scanning Tunneling Microscopy and Ambient-Pressure X-ray Photoelectron Spectroscopy Studies, No. LBNL-6577E, Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, 2013.Google Scholar
- C. R. Brundle and A. D. Baker, Electron Spectroscopy: Theory, Techniques and Applications (Academic Press, London, 1978), Vol. 2.Google Scholar
- K. Siegbahn et al., ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy (Almqvist and Wiksell, Uppsala, 1967).Google Scholar
- C. S. Fadley et al., Electron Spectroscopy: Theory, Techniques, and Applications (Academic, London 1978), Vol. 2.Google Scholar
- K. Siegbahn et al., ESCA Applied to Free Molecules (North-Holland, Amsterdam, 1970).Google Scholar
- C. S. Fadley, J. Electron. Spectrosc. Rel. Phen. 5 (1974).Google Scholar
- C. S. Fadley, Progress in Surface Science (Pergamon Press, New York, 1984).Google Scholar
- K. Siegbahn et al., ESCA Applied to Free Molecules (North-Holland Publishing Company, 1969).Google Scholar
- Scienta Omicron AB., Development Note: 25 mbar X-Ray Window for MX650 HP (2013).Google Scholar
- Scienta Omicron AB., Scienta Omicron HiPP-2/HiPP-3 Instrument Manual v2.1 (2016).Google Scholar