Fabrication of Si-based AFM Probe with High Q-factor for Fast Non-Contact Mode Scanning
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In non-contact atomic force microscopy, a feedback loop is used to maintain the set-point frequency relative to the force between the specimen and the cantilever. The quality factor of the cantilever affects the sensitivity of feedback loop. Therefore, the fabrication of a high-quality-factor cantilever to improve the scan speed of non-contact atomic force microscopy is highly desirable. Here, we optimized the thickness of the non-contact atomic force microscope’s cantilever to maximize the quality factor with a high resonant frequency. These maximized values reached about 1200 and 530 kHz, respectively. The corresponding scan rate was more than 0.12 mm/s, indicating that the cantilever can be used in high-speed non-contact atomic force microscopy.
KeywordsNC-AFM High Q-factor Fast speed scan High resonant frequency
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