Journal of the Korean Physical Society

, Volume 74, Issue 2, pp 94–97 | Cite as

Fabrication of Si-based AFM Probe with High Q-factor for Fast Non-Contact Mode Scanning

  • Sebin Bahn
  • Soo Bong ChoiEmail author
  • Woongkyu Park
  • Hae-Yong Jeong
  • Kyung-Ho Park


In non-contact atomic force microscopy, a feedback loop is used to maintain the set-point frequency relative to the force between the specimen and the cantilever. The quality factor of the cantilever affects the sensitivity of feedback loop. Therefore, the fabrication of a high-quality-factor cantilever to improve the scan speed of non-contact atomic force microscopy is highly desirable. Here, we optimized the thickness of the non-contact atomic force microscope’s cantilever to maximize the quality factor with a high resonant frequency. These maximized values reached about 1200 and 530 kHz, respectively. The corresponding scan rate was more than 0.12 mm/s, indicating that the cantilever can be used in high-speed non-contact atomic force microscopy.


NC-AFM High Q-factor Fast speed scan High resonant frequency 


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Copyright information

© The Korean Physical Society 2019

Authors and Affiliations

  • Sebin Bahn
    • 1
  • Soo Bong Choi
    • 1
    Email author
  • Woongkyu Park
    • 2
  • Hae-Yong Jeong
    • 3
  • Kyung-Ho Park
    • 3
  1. 1.Department of PhysicsIncheon National UniversityIncheonKorea
  2. 2.Department of Physics and Astronomy and Center for Atom Scale ElectromagnetismSeoul National UniversitySeoulKorea
  3. 3.Nanodevices Lab, Device Technology DivisionKorea Advanced Nano fab CenterSuwonKorea

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