Journal of the Korean Physical Society

, Volume 71, Issue 10, pp 684–691 | Cite as

Investigation of thermomechanical motion in a nanomechanical resonator based on optical intensity mapping

  • Sungwan Cho
  • Sang Goon Kim
  • Kimin Hong
  • Seung-Bo ShimEmail author
  • Myunglae Jo
  • Sung Un Cho
  • Yun Daniel ParkEmail author


Measurement of reflected optical light from the surface of microscopic structures can offer a precise tool to investigate the oscillatory motion of micro- and nano-mechanical resonators. We demonstrate an optical investigation of multiple flexural modes of a nanomechanical resonator in thermal motion based on amplitude-modulated laser light, with higher-order resonant modes up to ~ 17 MHz measured with this technique. Scanning focused laser light reproduces the mode shape of each flexural mode, and theoretical estimation of measurement sensitivity shows a displacement sensitivity of ~ 10 −15 m/Hz1/2. For nanomechanical devices incompatible with interferometric systems, this technique can exhibit sufficient sensitivity to explore small motional states.


Thermal motion Laser reflection measurement Mode mapping Finite element analysis 


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Copyright information

© The Korean Physical Society 2017

Authors and Affiliations

  • Sungwan Cho
    • 1
    • 2
    • 3
  • Sang Goon Kim
    • 2
    • 4
  • Kimin Hong
    • 4
  • Seung-Bo Shim
    • 2
    Email author
  • Myunglae Jo
    • 3
  • Sung Un Cho
    • 3
  • Yun Daniel Park
    • 3
    Email author
  1. 1.Graduate School of Nanoscience and TechnologyKorea Advanced Institute of Science and TechnologyDaejeonKorea
  2. 2.Korea Research Institute of Standards and ScienceDaejeonKorea
  3. 3.Department of Physics and AstronomySeoul National UniversitySeoulKorea
  4. 4.Department of PhysicsChungnam National UniversityDaejeonKorea

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