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Self-refreshing characteristics of an airborne particle sensor using a bridged paddle oscillator

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Abstract

We report on the self-refreshing characteristics of a micromachined airborne particle sensor. The sensor consists of a bridge-type beam having an oscillating paddle-type particle collector at its center. When a positive potential is applied to the paddle, the sensor is able to attract and collect negatively charged airborne particles while oscillating close to its resonant frequency and thereby measure their density from the change in the oscillating phase at ∼10 pg resolution. When the applied potential is removed, the collected particles are detached from the sensor due to momentum transfer from the oscillating paddle, thus demonstrating a self-refreshing capability.

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Authors and Affiliations

  1. Department of Electronic Engineering, Hanyang University, Seoul, 04763, Korea

    Eunsuk Choi & Seung-Beck Lee

  2. Tyco Electronics AMP Korea Co., Ltd., Seoul, 06734, Korea

    Bonghyun Park

  3. Institute of Nano Science and Technology, Hanyang University, Seoul, 04763, Korea

    Onejae Sul

Authors
  1. Eunsuk Choi
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  2. Seung-Beck Lee
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  3. Bonghyun Park
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  4. Onejae Sul
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Corresponding author

Correspondence to Seung-Beck Lee.

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Choi, E., Lee, SB., Park, B. et al. Self-refreshing characteristics of an airborne particle sensor using a bridged paddle oscillator. Journal of the Korean Physical Society 68, 1170–1175 (2016). https://doi.org/10.3938/jkps.68.1170

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  • DOI: https://doi.org/10.3938/jkps.68.1170

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