Journal of the Korean Physical Society

, Volume 61, Issue 7, pp 995–997 | Cite as

Inductively-coupled nonthermal plasma for synthesis of silicon nanocrystals

  • Kyoung Suk Oh
  • Seongbeom Kim
  • Jeong Chul Lee
  • Young-Soo Sohn
Letters

Abstract

Silicon nanocrystals (Si NCs) with an average diameter of 17.7 nm were synthesized using a flow-through, inductively-coupled nonthermal plasma. The crystalline Si nanoparticles (NPs) were confirmed by using transmission electron microscope (TEM) images, X-ray diffraction (XRD) analyses, and Raman spectroscopy measurements. In addition, scanning electron microscope (SEM) measurements showed that the use of a nonthermal plasma prevented the agglomeration of the Si NPs. These Si NCs synthesized by using a nonthermal plasma can be applied to various interesting fields such as photovoltaic cells, labels for biosensors, light-emitting diodes, and so forth.

Keywords

Silicon Nanocrystals Nonthermal plasma 

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Copyright information

© The Korean Physical Society 2012

Authors and Affiliations

  • Kyoung Suk Oh
    • 1
    • 2
  • Seongbeom Kim
    • 1
  • Jeong Chul Lee
    • 1
  • Young-Soo Sohn
    • 3
  1. 1.Korea Institute of Energy Research-Ulsan National Institute of Science & TechnologyAdvanced Center for EnergyDaejeonKorea
  2. 2.Department of Material Science and EngineeringChungnam National UniversityDaejeonKorea
  3. 3.Catholic University of DaeguGyeongsanKorea

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