Response improvement of integrated humidity sensors using a micropump
- 48 Downloads
An integrated humidity sensor system with micropumps was fabricated, and its pumping capability and response characteristics were investigated. The suitability of valve-less micropumps in the sensor system was demonstrated through a simple micromachining process using deep reactive ion etching (DRIE) and an anodic bonding step. The Reynolds number of the pump with a diffuser angle of 19° is about 1200, and the maximum flow rate is 0.176 μl/min. The optimum resonant frequency is 100 Hz for water and 600∼800 Hz for air. The sensitivity of the humidity sensor system with pumping is 10 times higher than it is without pumping for repeated refresh cycles.
Keywordsmicropump integrated humidity sensor DRIE CMOS response time
Unable to display preview. Download preview PDF.
- 14.R. Linnemann, P. Woias, C. D. Senfft and J. A. Ditterich, Proc. MEMS ’98, 25–29, 532, Heidelberg, Germany (1998).Google Scholar