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Structural Model of a Nano Piezoelectric Actuator for Nanotechnology

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Abstract

The article presents a structural model of a nano piezoelectric actuator for nanotechnology. A structural diagram of a nano piezoelectric actuator is calculated and its matrix equation is derived. The mechanical and adjustment characteristics of a nano piezoelectric actuator are determined.

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Funding

This work was supported by ongoing institutional funding. No additional grants to carry out or direct this particular research were obtained.

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  1. National Research University of Electronic Technology (MIET), 124498, Zelenograd, Moscow, Russia

    S. M. Afonin

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  1. S. M. Afonin
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Correspondence to S. M. Afonin.

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Translated by A. Ovchinnikova

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Afonin, S.M. Structural Model of a Nano Piezoelectric Actuator for Nanotechnology. Russ. Engin. Res. 44, 14–19 (2024). https://doi.org/10.3103/S1068798X24010052

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