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Optimal control of a multilayer submicromanipulator with a longitudinal piezo effect

Russian Engineering Research volume 35, pages 907–910 (2015)Cite this article

Abstract

Optimal control of a multilayer piezo submicromanipulator with a longitudinal piezo effect is considered. Control functions are presented. The equation of the switching line in the control of the multilayer piezo actuator is derived.

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References

  1. Mironov, V.L., Osnovy skaniruyushchei zondovoi mikroskopii (Principles of Scanning Probe Microscopy), Moscow: Tekhnosfera, 2004.

    Google Scholar 

  2. Akop’yan, V.A., Panich, A.E., Solov’ev, A.N., et al., Physicomechanical problems and applications of piezoelectric actuators, Nano. Mikrosist. Tekhn., 2006, no. 10, pp. 35–40.

    Google Scholar 

  3. Physical Acoustics, Mason, W.P., Ed., New York: Academic, 1964, vol. 1A.

  4. Safronov, A.Ya., Klimashin, V.M., Parfenov, B.G., et al., Piezoceramic modular and one-piece piezo actuators, Komp. Tekhnol., 2002, no. 6, pp. 26–28.

    Google Scholar 

  5. Kazakov, V.K., Klimashin, V.M., Nikiforov, V.G., et al., Multilayer piezo actuators and their applications, Komp. Tekhnol., 2007, no. 6, pp. 62–65.

    Google Scholar 

  6. Kazakov, V.K., Nikiforov, V.G., and Safronov, A.Ya., Actuators for optical gates and measurement of their characteristics, Nano. Mikrosist. Tekhn., 2007, no. 10, pp. 52–55.

    Google Scholar 

  7. Afonin, S.M., Structural–parametric model of a piezo nanomotor, Vestn. Mashinostr., 2001, no. 5, pp. 29–33.

    Google Scholar 

  8. Afonin, S.M., Nanoand microscale piezo motors, Russ. Eng. Res., 2012, vol. 32, no. 7/8, pp. 519–522.

    Article  Google Scholar 

  9. Afonin, S.M., Electroelasticity problems for multilayer nanoand micromotors, Russ. Eng. Res., 2011, vol. 31, no. 9, pp. 842–847.

    Article  Google Scholar 

  10. Besekerskii, V.A. and Popov, E.P., Teoriya sistem avtomaticheskogo regulirovaniya (Theory of Automatic Control Systems), Moscow: Professiya, 2004.

    Google Scholar 

  11. Lenk, A., Elektromekhanische Systeme, Berlin: VEB, 1971.

    Google Scholar 

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Authors and Affiliations

  1. Moscow State Institute of Electronic Technology (MIET), Moscow, Russia

    S. M. Afonin

Authors
  1. S. M. Afonin
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Correspondence to S. M. Afonin.

Additional information

Original Russian Text © S.M. Afonin, 2015, published in Vestnik Mashinostroeniya, 2015, No. 9, pp. 46–49.

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Afonin, S.M. Optimal control of a multilayer submicromanipulator with a longitudinal piezo effect. Russ. Engin. Res. 35, 907–910 (2015). https://doi.org/10.3103/S1068798X15120035

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  • DOI: https://doi.org/10.3103/S1068798X15120035

Keywords

  • multilayer piezo manipulator
  • piezo actuator
  • nanomanipulator
  • micromanipulator
  • optimal control
  • Pontryagin principle