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Mechanical and control characteristics of simple and multilayer nano- and micro-scale piezo motors

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Abstract

Statistical and dynamic characteristics of simple and multilayer nano- and micro-scale piezo motors with longitudinal and transverse piezo effects are determined.

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Authors and Affiliations

  1. Moscow State Institute of Electronic Technology (Technical University), Moscow, Russia

    S. M. Afonin

Authors
  1. S. M. Afonin
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Additional information

Original Russian Text © S.M. Afonin, 2011, published in Vestnik Mashinostroeniya, 2011, No. 12, pp. 3–12.

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Afonin, S.M. Mechanical and control characteristics of simple and multilayer nano- and micro-scale piezo motors. Russ. Engin. Res. 31, 1165–1174 (2011). https://doi.org/10.3103/S1068798X11120057

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  • DOI: https://doi.org/10.3103/S1068798X11120057

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