Laser Formation of Holes in Nonmetallic Substrates

Abstract

The use of a pulse picosecond laser with a wavelength of 532 nm and frequency of 15 Hz in the formation of holes with diameters up to 0.1 mm in nonmetallic substrates (silicon, ceramics, etc.) was proposed. It was found by modeling in MathCAD and COMSOL Multiphysics that the half-angle value of the light cone aperture that depends on the focusing of laser radiation exerts a significant effect on the depth and diameter of holes in laser processing. The influence of the regimes of laser processing employing nanosecond and picosecond lasers with wavelengths of 1064 and 532 nm, respectively, on the conicity and time of formation of holes in silicon substrates was investigated. The preliminary heating of the substrate to 170–200°С reduces the time of formation of the holes by 20%.

This is a preview of subscription content, access via your institution.

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.
Fig. 6.
Fig. 7.
Fig. 8.

REFERENCES

  1. 1

    Mukhina, E. and Bashta, P., Elektron. Nauka, Tekhnol., Biz., 2009, no. 2, pp. 92–93.

  2. 2

    Wolfgang, S. and Reinhart, P., J. Laser Appl., 2013, vol. 25, pp. 3–22. https://doi.org/10.2351/1.4773837

    Article  Google Scholar 

  3. 3

    Kreutz, E.W., Horn, A., and Poprawe, R., Appl. Surf. Sci., 2005, vol. 248, nos. 1–4, pp. 66–70. https://doi.org/10.1016/j.apsusc.2005.03.034

    Article  Google Scholar 

  4. 4

    Vaks, E.D., Milen’kii, M.N., and Saprykin, L.G., Praktika pretsizionnoi lazernoi obrabotki (Practical Manual on Precise Laser Processing), Moscow: Tekhnosfera, 2013.

  5. 5

    Veiko, V.P., Libenzon, M.N., Chervyakov, G.G., and Yakovlev, E.B., Vzaimodeistvie lazernogo izlucheniya s veshchestvom (Interaction of Laser Radiation with Substance), Moscow: Fizmatlit, 2008.

  6. 6

    Madou, M.J., Fundamentals of Microfabrication and Nanotechnology, vol. 2: Manufacturing Techniques for Microfabrication and Nanotechnology, Boca Raton, FL: CRC, 2011.

    Google Scholar 

  7. 7

    Sokolova, T.N. and Surmenko, L.A., in Obzory po elektronnoi tekhnike. Tekhnologiya, organizatsiya proizvodstva i oborudovanie (Review on Electronic Engineering: Technology, Organization of Production, and Equipment), Moscow: Elektronika, 1986.

  8. 8

    Lanin, V.L., Volk, S.A., and Pervenetskii, A.P., Tekhnol. Elektron. Prom-sti, 2019, no. 2, pp. 57–59.

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to V. L. Lanin.

Ethics declarations

The authors declare that they have no conflict of interest.

Additional information

Translated by T. Shemyakova

About this article

Verify currency and authenticity via CrossMark

Cite this article

Lanin, V.L., Fam, V.T. & Chan, N.D. Laser Formation of Holes in Nonmetallic Substrates. Surf. Engin. Appl.Electrochem. 56, 754–761 (2020). https://doi.org/10.3103/S1068375520060101

Download citation

Keywords:

  • laser radiation
  • nonmetallic substrates
  • silicon
  • holes