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Electrochemical micromachining using vibratile tungsten wire for high-aspect-ratio microstructures

  • Electrical Precision Treatment of Materials
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Surface Engineering and Applied Electrochemistry Aims and scope Submit manuscript

Abstract

Electrochemical micromachining can remove electrically conductive materials with the transferring of ions, so that high precision is achievable. A novel method for fabricating high-aspect-ratio microstructures by electrochemical micromachining using vibratile tungsten wire was proposed in this paper. The slight vibration of tungsten wire can improve the machining stability. The relations between the machining accuracy and machining parameters were experimentally studied. Micro groove with the width of 15 μm was machined, and micro sharp-angles structure with aspect ratio of 10 was obtained experimentally.

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Authors and Affiliations

  1. College of Mechanical Engineering, Tongji University, Shanghai, 200092, China

    K. Wang

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  1. K. Wang
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Correspondence to K. Wang.

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Wang, K. Electrochemical micromachining using vibratile tungsten wire for high-aspect-ratio microstructures. Surf. Engin. Appl.Electrochem. 46, 395–399 (2010). https://doi.org/10.3103/S1068375510050017

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  • DOI: https://doi.org/10.3103/S1068375510050017

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