Abstract
Ways to improve the operational performances of inertial piezodrives in the nanometer range of displacements are presented. It is proposed to use a magnetic field-conductor electrodynamic system to improve the accuracy of displacement, to measure the travel speed of the movable object, and to damp the vibrations of the drive’s piezoelement.
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References
Lipanov, A.M., Gulyaev, P.V., and Shelkovnikov, E.Yu., RF Patent no. 2205474 RF, Izobreteniya, 2003, no. 15.
Gulyaev, P.V., RF Patent no. 2247467 RF. MPK 7 H01L41/09, Izobreteniya, 2005, no. 6.
Additional information
Original Russian Text © A.M. Lipanov, Yu.K. Shelkovnikov, P.V. Gulyaev, A.V. Tyurikov, 2009, published in Elektrotekhnika, 2009, No. 8, pp. 7–11.
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Lipanov, A.M., Shelkovnikov, Y.K., Gulyaev, P.V. et al. Application of electrodynamic and magnetic circuits in inertial piezoelectric drives. Russ. Electr. Engin. 80, 422–425 (2009). https://doi.org/10.3103/S1068371209080021
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DOI: https://doi.org/10.3103/S1068371209080021