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Application of electrodynamic and magnetic circuits in inertial piezoelectric drives

  • A. M. Lipanov
  • Yu. K. Shelkovnikov
  • P. V. Gulyaev
  • A. V. Tyurikov
Article

Abstract

Ways to improve the operational performances of inertial piezodrives in the nanometer range of displacements are presented. It is proposed to use a magnetic field-conductor electrodynamic system to improve the accuracy of displacement, to measure the travel speed of the movable object, and to damp the vibrations of the drive’s piezoelement.

Key words

inertial piezodrive precision displacements magnetic damping electrodynamic system compensation electrodynamic velocity sensor magnetic circuit 

References

  1. 1.
    Lipanov, A.M., Gulyaev, P.V., and Shelkovnikov, E.Yu., RF Patent no. 2205474 RF, Izobreteniya, 2003, no. 15.Google Scholar
  2. 2.
    Gulyaev, P.V., RF Patent no. 2247467 RF. MPK 7 H01L41/09, Izobreteniya, 2005, no. 6.Google Scholar

Copyright information

© Allerton Press, Inc. 2009

Authors and Affiliations

  • A. M. Lipanov
  • Yu. K. Shelkovnikov
  • P. V. Gulyaev
  • A. V. Tyurikov

There are no affiliations available

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