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Effect of vacuum annealing on tribological behavior of nanosized diamond-like carbon coatings produced by pulse vacuum-arc method

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Abstract

Results of tribotests of nanosized carbon coatings formed on silicon surfaces by the pulse vacuum-arc method at various orientations of substrates with regard to a carbon plasma flow are presented; the tribotests were carried out for as-deposited coatings and coatings annealed in vacuum at 600 and 800°C. It has been shown that, among as-deposited coatings, the carbon coating deposited on a substrate perpendicular to the axis of the plasma flow has the highest wear resistance. An increase in the wear resistance of diamond-like carbon coatings after annealing at 600°C has been found.

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Authors and Affiliations

  1. National Research University Belgorod State University, ul. Pobedy 85, Belgorod, 308015, Russia

    M. G. Kovaleva, A. J. Kolpakov, A. I. Poplavsky & M. E. Galkina

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  1. M. G. Kovaleva
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  2. A. J. Kolpakov
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  3. A. I. Poplavsky
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  4. M. E. Galkina
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Corresponding author

Correspondence to M. G. Kovaleva.

Additional information

Original Russian Text © M.G. Kovaleva, A.J. Kolpakov, A.I. Poplavsky, M.E. Galkina, 2013, published in Trenie i Iznos, 2013, Vol. 34, No. 6, pp. 628–634.

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Kovaleva, M.G., Kolpakov, A.J., Poplavsky, A.I. et al. Effect of vacuum annealing on tribological behavior of nanosized diamond-like carbon coatings produced by pulse vacuum-arc method. J. Frict. Wear 34, 481–486 (2013). https://doi.org/10.3103/S1068366613060081

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  • DOI: https://doi.org/10.3103/S1068366613060081

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