Abstract
The three-layer diamond-like carbon films grown on the glass from the decomposition of toluene and nitrogen by Plasma Enhanced Chemical Vapor Deposition technique. The optimal parameters of three-layered structures with the minimum reflection in the range of 400–750 nm were theoretically calculated using the generalized transfer-matrix technique. The dependence of the refractive index of grown films on the plasma power and nitrogen concentration in the gas mixture was investigated.
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Original Russian Text © Zh.R. Panosyan, A.Zh. Khachatrian, D.B. Hayrapetyan, S.S. Voskanyan, Y.V. Yengibaryan, 2015, published in Izvestiya NAN Armenii, Fizika, 2015, Vol. 50, No. 1, pp. 96–104.
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Panosyan, Z.R., Khachatrian, A.Z., Hayrapetyan, D.B. et al. Three-layer antireflection diamond-like carbon films on glass. J. Contemp. Phys. 50, 72–78 (2015). https://doi.org/10.3103/S1068337215010119
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DOI: https://doi.org/10.3103/S1068337215010119