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Plasma-Chemical Method for Synthesis of Nanosized Silicon Carbide Powder Using Microwave Surface Discharge

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Abstract—

The results of the first experiments on the preparation of silicon carbide nanopowders using a surface microwave discharge in a mixture of monosilane and methane are presented. It is shown that nanosized crystalline silicon carbide is formed as the main product of the reactions, and nanosized crystalline silicon is formed as the by-product. The average particle size is 13 nm.

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Authors and Affiliations

  1. Prokhorov General Physics Institute, Russian Academy of Sciences, 119991, Moscow, Russia

    A. M. Davydov, K. V. Artemiev & N. G. Gusein-zade

  2. Moscow State University, 119991, Moscow, Russia

    D. I. Shilingovskiy

Authors
  1. A. M. Davydov
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  2. K. V. Artemiev
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  3. D. I. Shilingovskiy
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  4. N. G. Gusein-zade
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Correspondence to A. M. Davydov.

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Translated by A. Kazantsev

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Davydov, A.M., Artemiev, K.V., Shilingovskiy, D.I. et al. Plasma-Chemical Method for Synthesis of Nanosized Silicon Carbide Powder Using Microwave Surface Discharge. Bull. Lebedev Phys. Inst. 50, 391–395 (2023). https://doi.org/10.3103/S1068335623090026

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  • DOI: https://doi.org/10.3103/S1068335623090026

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