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Observation of the Fano Resonance in a Semiconductor Structure with a pn Junction Formed in a Porous Silicon Film

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Abstract

The observation of a Fano resonance by Raman spectroscopy in a semiconductor structure with a pn junction formed by thermal diffusion of boron in a porous silicon film is reported. The porous film is grown by metal-assisted etching on a single-crystal n-type silicon substrate.

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Correspondence to N. N. Melnik, V. V. Tregulov, G. N. Skoptsova or A. I. Ivanov.

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Translated by A. Kazantsev

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Melnik, N.N., Tregulov, V.V., Skoptsova, G.N. et al. Observation of the Fano Resonance in a Semiconductor Structure with a pn Junction Formed in a Porous Silicon Film. Bull. Lebedev Phys. Inst. 50, 52–54 (2023). https://doi.org/10.3103/S1068335623020057

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  • DOI: https://doi.org/10.3103/S1068335623020057

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