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Calculation of Vibrations of Silicon Membranes for an Acoustic Receiver

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Abstract

The results of simulation and experimental study of resonant properties of membranes for acoustic receivers are presented. The simulation is performed in the Comsol Multiphysics (Acoustic Solid Interaction, Frequency Domain) software package. The frequency response of rectangular membranes 8 × 8 × 0.05 mm3 in size, made of single-crystal silicon is determined. The operation of the constructed model is verified. It is found that the calculated and experimentally measured resonant frequencies of the membrane are consistent. It is shown that the acoustic receiver sensitivity can be significantly improved by varying the membrane fixture conditions while retaining its geometrical sizes.

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REFERENCES

  1. Sessler, G.M., Acoustic sensors, Sens. Actuators, A, 1991, vol. 26, no. 1–3, pp. 323–330. https://doi.org/10.1016/0924-4247(91)87011-Q

  2. Seo, Y.M., Park, J.J., Lee, S.H., Park, C.M., Kim, C.K., and Lee, S.H., Acoustic metamaterial exhibiting four different sign combinations of density and modulus, J. Appl. Phys., 2012, vol. 111, no. 2, p. 023504. https://doi.org/10.1063/1.3676262

    Article  ADS  Google Scholar 

  3. Huang, C.H., Gao, H., Haouari, R., Troia, B., Mao, S., Jansen, Rochus, V., and Rottenberg, X., Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology, 2017 IEEE International Ultrasonics Symposium (IUS), Washington, 2017, pp. 1–4. https://doi.org/10.1109/ULTSYM.2017.8092985

  4. Romashko, R.V., Kulchin, Yu.N., Bezruk, M.N., and Ermolaev, S.A., Laser adaptive holographic hydrophone, Quantum Electron., 2016, vol. 46, no. 3, pp. 277–280. https://doi.org/10.1070/QEL15976

    Article  ADS  Google Scholar 

  5. Romashko, R.V., Kulchin, Y.N., and Nippolainen, E., Highly sensitive and noise-protected adaptive optical microphone based on a dynamic photorefractive hologram, Laser Phys., 2014, vol. 24, no. 11, p. 115604. https://doi.org/10.1088/1054-660X/24/11/115604

  6. Malokhatko, S.V., Gusev, E.Y., Rassolov, E.A., Khannanov, A.M., and Ageev, O.A., Research of the mechanical parameters of silicon membranes for acoustic sensors, J. Phys.: Conf. Ser., 2020, vol. 1695, p. 012183. https://doi.org/10.1088/1742-6596/1695/1/012183

  7. Kamshilin, A.A., Romashko, R.V., and Kulchin, Yu.N., Adaptive interferometry with photorefractive crystals, J. Appl. Phys., 2009, vol. 105, p. 031101. https://doi.org/10.1063/1.3049475

    Article  ADS  Google Scholar 

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Funding

This study was supported by the Russian Science Foundation (project no. 19-12-00323). Membrane fabrication was supported by the Russian Foundation for Basic Research, project no. 20-37-90087.

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Authors and Affiliations

  1. Institute of Automation and Control Processes, Far Eastern Branch of the Russian Academy of Sciences, 690041, Vladivostok, Russia

    T. A. Efimov, E. A. Rassolov & Yu. N. Kulchin

  2. Far Eastern Federal University, 690091, Vladivostok, Russia

    E. A. Rassolov & Yu. N. Kulchin

  3. Southern Federal University, Institute of Nanotechnologies, Electronics and Equipment Engineering, 347922, Taganrog, Russia

    S. V. Malokhatko, E. Yu. Gusev & O. A. Ageev

  4. Southern Federal University, Research and Education Center “Nanotechnologies”, 347922, Taganrog, Russia

    S. V. Malokhatko & O. A. Ageev

  5. Lebedev Physical Institute, Russian Academy of Sciences, 119991, Moscow, Russia

    I. N. Zavestovskaya

Authors
  1. T. A. Efimov
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  2. E. A. Rassolov
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  3. Yu. N. Kulchin
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  4. S. V. Malokhatko
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  5. E. Yu. Gusev
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  6. O. A. Ageev
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  7. I. N. Zavestovskaya
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Corresponding author

Correspondence to T. A. Efimov.

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The authors declare that they have no conflicts of interest.

Additional information

Translated by A. Kazantsev

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Efimov, T.A., Rassolov, E.A., Kulchin, Y.N. et al. Calculation of Vibrations of Silicon Membranes for an Acoustic Receiver. Bull. Lebedev Phys. Inst. 49, 78–82 (2022). https://doi.org/10.3103/S1068335622030034

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  • DOI: https://doi.org/10.3103/S1068335622030034

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