Bulletin of the Lebedev Physics Institute

, Volume 45, Issue 1, pp 1–5 | Cite as

Microfocus X-Ray Tubes with a Silicon Autoemission Nanocathode as an X-Ray Source

  • N. A. Dyuzhev
  • G. D. Demin
  • T. A. Gryazneva
  • A. E. Pestov
  • N. N. Salashchenko
  • N. I. Chkhalo
  • F. A. Pudonin
Article

Abstract

To develop nanostructures with extremely low spatial resolution (to 10 nm and below), a new concept of the use of arrays of microfocus X-ray tubes based on field emission silicon nanocathodes is proposed. A new λ-tunable microfocus source of X-ray radiation, based on a thinfilm transmission target with field emission nanocathode with tunable wavelength, is proposed. The possibility of decreasing the exposed area size to 20 nm and smaller by varying the tube blocking voltage is shown. The use of these X-ray sources opens a new way of developing maskless X-ray lithography.

Keywords

field emission cathode maskless X-ray lithography microfocus X-ray tube field emission nanostructures vacuum nanoelectronics 

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Copyright information

© Allerton Press, Inc. 2018

Authors and Affiliations

  • N. A. Dyuzhev
    • 1
  • G. D. Demin
    • 1
  • T. A. Gryazneva
    • 1
  • A. E. Pestov
    • 2
  • N. N. Salashchenko
    • 2
  • N. I. Chkhalo
    • 2
  • F. A. Pudonin
    • 3
  1. 1.National Research University of Electronic Technology (MIET)Zelenograd, Moscow oblastRussia
  2. 2.Institute for Physics ofMicrostructuresRussian Academy of SciencesNizhni NovgorodRussia
  3. 3.Lebedev Physical InstituteRussian Academy of SciencesMoscowRussia

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