Skip to main content
Log in

The effect of the deposition parameters of nitrides of high-entropy alloys (TiZrHfVNb)N on their structure, composition, mechanical and tribological properties

  • Production, Structure, Properties
  • Published:
Journal of Superhard Materials Aims and scope Submit manuscript

Abstract

Nitrides of high-entropy alloys TiZrHfVNb produced using a vacuum-arc cathode evaporation have been studied using scanning electron and atomic force microscopies, energy dispersive, Rutherford ions backscattering, and X-ray diffraction analyses, microhardness measurements, and tribological tests. It has been found that the deposition parameters affect the structure, surface morphology, distribution of elements, mechanical and tribological properties of the coatings under study.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Pogrebnjak, A.D. and Kravchenko, Yu.A., Modification of Mechanical Properties of TiN/Al2O3 and TiN/Cr/Al2O3Coatings Using Low-Energy High-Current Electron Beams, J. Superhard Mater., 2013, vol. 35, no. 2, pp. 105–110.

    Article  Google Scholar 

  2. Musil, J., Hard Nanocomposite Coatings: Thermal Stability, Oxidation Resistance and Toughness, Surf. and Coat. Tech., 2012, vol. 207, pp. 50–65.

    Article  Google Scholar 

  3. Pogrebnjak, A.D., Shpak, A.P., Azarenkov, N.A. and Beresnev, V.M., Structure and properties of Hard and Superhard Nanocomposite Coatings, UPhN, 2009, vol. 179, no. 1, pp. 35–63.

    Google Scholar 

  4. Pogrebnyak, A.D., Ponomarev, A.G., Kolesnikov, et al., Effect of Mass Transfer and Segregation on the Formation of Superhard Nanostructured Ti-Hf-N(Fe) Coatings, Techn. Phys. Lett., 2012, vol. 38, no. 7, pp. 623–626.

    Article  CAS  Google Scholar 

  5. Pogrebnjak, A.D., Beresnev, V.M., Demianenko, A.A., Baidak, V.S., Komarov, F.F., Kaverin, M.V., Makhmudov, N.A., and Kolesnikov, D.A., Adhesive Strength, Supermicrohardness, and the Phase and Elemental Compositions of Nanostructured Coatings Based on Ti-Hf-Si-N, Phys. of the Solid State, 2012, vol. 54, no. 9, pp. 1882–1890.

    Article  CAS  Google Scholar 

  6. Pogrebnjak, A.D., Shpak, A.P., Beresnev, V.M., et al., Effect of Thermal Annealing in Vacuum and Air on Nanograin Sizes in Hard and Superhard Coatings Zr-Ti-Si-N, J. Nanosci. and Nanotechn., 2012, vol. 12, no. 12, pp. 9213–9219.

    Article  CAS  Google Scholar 

  7. Borisov, D.P., Moshkov, D.Yu., Ovchinnikov, S.V., Oskomov, K.V., Pinzhin, Yu.P., Savostikov, V.M., Tyumentsev, A.N., and Korotaev, A.D., Nanocomposite and Nanostructural Superhard Coatings of the Ti-Si-B-N System, Isvestiya Vuzov, Fizika, 2007, vol. 50, no. 10, pp. 13–23.

    Google Scholar 

  8. Pogrebnjak, A.D., Sobol, O.V., Beresnev, V.M., et al., Phase Composition, Thermal Stability, Physical and Mechanical Properties of Superhard on Base Zr-Ti-Si-N Nanocomposite Coatings, Nanostructured Materials and Nanotechnology, IV: Ceramic Eng. Sci. Proc., 2010, vol. 31, no. 7, pp. 127–138.

    Article  CAS  Google Scholar 

  9. Veprek, S. and Veprek-Heijman, M.G.J., Limits to the Preparation of Superhard Nanocomposites: Impurities, Deposition, and Annealing Temperature, Thin Solid Films, 2012, vol. 522, pp. 274–282.

    Article  CAS  Google Scholar 

  10. Yeh, J.-W., Chen, Y.-L., Lin, S.-J, and Chen, S.-K., High Entropy Alloys—A New Era of Exploitation, Mater. Sci. Forum, 2007, vol. 560, pp. 1–9.

    Article  CAS  Google Scholar 

  11. Lai, C.-H., Tsai, M.-H., Lin, S.-J., and Yeh, J.-W., Influence of Substrate Temperature on Structure and Mechanical, Properties of Multi-Element (AlCrTaTiZr)N Coatings, Surf. Coat. Technol., 2007, vol. 201, pp. 6993–6998.

    Article  CAS  Google Scholar 

  12. Huang, P.K. and Yeh, J.W., Effects of Nitrogen Content on Structure and Mechanical Properties of Multi-Element (AlCrNbSiTiV)N Coating, ibid., 2009, vol. 203, pp. 1891–1896.

    Article  CAS  Google Scholar 

  13. Chang, Sh.-Y. and Chen, D.-Sh., 10-nm-Thick Quinary (AlCrTaTiZr)N Film as Effective Diffusion Barrier for Cu Interconnects at 900°C, Appl. Phys. Lett., 2009, vol. 94, art. 231909.

  14. Liang, S.-Ch., Chang, Z.-Ch., Tsai, D.-Ch., Lin, Y.-Ch., Sung, H.-Sh., Deng, M.-J., and Shieu, F.-Sh., Effects of Substrate Temperature on the Structure and Mechanical Properties of (TiVCrZrHf)N Coatings, Appl. Surf. Sci., 2011, vol. 257, pp. 7709–7713.

    Article  CAS  Google Scholar 

  15. Chang, Z.-Ch., Liang, Sh.-Ch., and Han, Sh., Effect of Microstructure on the Nanomechanical Properties of TiVCrZrAl Nitride Films Deposited by Magnetron Sputtering, Nuclear Instruments and Methods in Physics Research B, 2011, vol. 269, pp. 1973–1976.

    Article  CAS  Google Scholar 

  16. Krause-Reihberg, R., Pogrebnjak, A.D., Borisyuk, V.N., Kaverin, M.V., Ponomarev, A.G., Belokur, M.A., Oishi, K., Takeda, I., Beresnev, V.M., and Sobol’, O.V., Analysis of Local Regions Near Interfaces in Nanostructural Multicomponent Coatings (Ti-Zr-Hf-V-Nb)N, Produced by the Cathodic-Arc-Vapor Deposition from the Arc of the Evaporating Cathode, Physics of Metals and Metallography, 2013, vol. 114, no. 8, pp. 672–680.

    Article  Google Scholar 

  17. Mishra, Aj.K., Samal, S., and Biswas, Kr., Solidification Behavior of Ti-Cu-Fe-Co-Ni High Entropy Alloys, Transactions of the Indian Institute of Metals, 2012, vol. 65, issue 6, pp. 725–730.

    Article  Google Scholar 

  18. Tsai, Ch.-W., Lai, S.-W., Cheng, K.-H., et al., Strong Amorphization of High-Entropy AlBCrSiTi Nitride Film, Thin Solid Films, 2012, vol. 520, issue 7, pp. 2613–2618.

    Article  Google Scholar 

  19. Firstov, S.A., Gorban’, V.F., Krapivka, N.A., and Pechkovskii, E.P., Hardening and Mechanical Properties of Cast High-Entropy Alloys, Composity i Nanostruktury, 2011, no. 2, pp. 5–20.

    Google Scholar 

  20. Braic, V., Balaceanu, M., Braic, M.A., Vladescu, A., et al., Characterization of Multi-Principal-Element (TiZrNbHfTa)N and (TiZrNbHfTa)C Coatings for Biomedical Applications, J. Mechanical Behavior of Biomedical Materials, 2012, vol. 10, pp. 197–205.

    Article  CAS  Google Scholar 

  21. www.simnra.com

  22. Khomenko, A.V. and Prodanov, N.V., Molecular Dynamics Simulations of Ultrathin Water Film Confined between Flat Diamond Plates, Condensed Matter., 2008, vol. 11, no. 4(56), pp. 615–626.

    Google Scholar 

  23. Khomenko, A.V., Noise Influence on Solid-Liquid Transition of Ultrathin Lubricant Film, Phys. Lett. A, 2004, vol. 329, no. 1-2, pp. 140–147.

    Article  CAS  Google Scholar 

  24. Kotunowicz, T.N., Zukowski, P.V., Fedotova, V.V., Saad, A.M., Larkin, A.V., and Fedotov, A.K., The Features of Real Part of Admittance in the Nanocomposites (Fe45Co45Zr10)(Al2O3)100−x Manufactured by the Ion-Beam Sputtering Technique with Ar Ions, Acta Physica Polonica A, 2011, vol. 120, no. 1, pp. 35–38.

    Google Scholar 

  25. Larkin, A.V., Fedotov, A.K., Fedotova, J.A., Kotunowicz, T.N., and Zukowski, P.V., Temperature and Frequency Dependences of Impedance Real Part in the FeCoZr-Doped PZT Nanogranular Composites, Mater. Science-Poland, 2012, vol. 30, issue 2, pp. 75–81.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

Original Russian Text © A.D. Pogrebnjak, I.V. Yakushchenko, G. Abadias, P. Chartier, O.V. Bondar, V.M. Beresnev, Y. Takeda, O.V. Sobol’, K. Oyoshi, A.A. Andreyev, B.A. Mukushev, 2013, published in Sverkhtverdye Materialy, 2013, Vol. 35, No. 6, pp. 36–51.

About this article

Cite this article

Pogrebnjak, A.D., Yakushchenko, I.V., Abadias, G. et al. The effect of the deposition parameters of nitrides of high-entropy alloys (TiZrHfVNb)N on their structure, composition, mechanical and tribological properties. J. Superhard Mater. 35, 356–368 (2013). https://doi.org/10.3103/S106345761306004X

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.3103/S106345761306004X

Keywords

Navigation