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Three-Dimensional Optical Lithography and Nanoscale Optical Connectors

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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

Three-dimensional optical connectors for connecting planar waveguides made of silicon are created via direct laser writing. The morphology and optical properties of the resulting structures are compared. Hybrid three-dimensional optical connectors can be used to transmit the light from effective sources of single photons based on colloidal quantum dots and substituted nitrogen and silicon vacancies (NV and Si centers) in diamond, which can be incorporated into a polymer printed wiring board during its manufacture, to planar waveguides for subsequent use in photonic integrated circuits.

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ACKNOWLEDGMENTS

The authors thank the staff of the shared resource center of the Moscow Institute of Physics and Technology for their assistance in our scanning electron microscopy.

Funding

This work was supported by the Russian Science Foundation, project no. 17-79-20418 (3D modeling and stereolithography); and by the Russian Foundation for Basic Research, project nos. 18-29-20129 and 18-02-00811 (tests of direct laser writing).

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Authors and Affiliations

  1. Moscow Institute of Physics and Technology, 141701, Dolgoprudny, Moscow oblast, Russia

    A. G. Vitukhnovsky, R. D. Zvagelsky, D. A. Kolymagin, A. V. Pisarenko & D. A. Chubich

  2. Lebedev Physical Institute, Russian Academy of Sciences, 119991, Moscow, Russia

    A. G. Vitukhnovsky

Authors
  1. A. G. Vitukhnovsky
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  2. R. D. Zvagelsky
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  3. D. A. Kolymagin
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  4. A. V. Pisarenko
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  5. D. A. Chubich
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Corresponding author

Correspondence to A. G. Vitukhnovsky.

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Translated by V. Alekseev

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Vitukhnovsky, A.G., Zvagelsky, R.D., Kolymagin, D.A. et al. Three-Dimensional Optical Lithography and Nanoscale Optical Connectors. Bull. Russ. Acad. Sci. Phys. 84, 760–765 (2020). https://doi.org/10.3103/S1062873820070321

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  • DOI: https://doi.org/10.3103/S1062873820070321

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