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An Acousto-Electric Nanobiosensor

  • A. E. MelnikovEmail author
  • E. S. Soldatov
  • I. E. Kuznetsova
  • V. V. Kolesov
  • V. I. Anisimkin
  • V. V. Kashin
Article
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Abstract

A technology is developed that uses two multiscale structures on a single crystal piezoelectric substrate of lithium niobate. A system of counter-pin electrodes for an acoustic delay line operating in the 2–3 MHz range is formed via photolithography. The system is combined with nanotransducers 60–80 nm in size, produced by means of negative electron-beam nanolithography.

Notes

ACKNOWLEDGMENTS

The development and production of the topology of the planar electrode structure for our hybrid acousto-electric nanosensor was supported by the Russian Science Foundation, project no. 18-49-08005. The development and production of our tunnel nanostructures was supported by the Russian Foundation for Basic Research, project no. 16-07-00933.

REFERENCES

  1. 1.
    Polyakov, V.V., in Advanced Nano- and Piezoelectric Materials and Their Applications, Parinov, I.A., Ed., New York: Nova Science, 2014, p. 19.Google Scholar
  2. 2.
    Scognamiglio, V., Pezzotti, G., Pezzotti, I., et al., Microchim. Acta, 2010, vol. 170, p. 215.CrossRefGoogle Scholar

Copyright information

© Allerton Press, Inc. 2019

Authors and Affiliations

  • A. E. Melnikov
    • 1
    Email author
  • E. S. Soldatov
    • 1
    • 3
  • I. E. Kuznetsova
    • 2
  • V. V. Kolesov
    • 2
  • V. I. Anisimkin
    • 2
  • V. V. Kashin
    • 2
  1. 1.Faculty of Physics, Moscow State UniversityMoscowRussia
  2. 2.Institute of Radioengineering and Electronics, Russian Academy of SciencesMoscowRussia
  3. 3.Center for Quantum Technologies, Moscow State UniversityMoscowRussia

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