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Graphitization of a diamond surface upon high-dose ion bombardment

  • Proceedings of the 22nd International Conference “Ion-Surface Interaction (ISI-2015)”
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

Results from structural and morphological studies, measurements of the sheet electrical resistance, and estimating resistivity ρm of a graphite-like conducting surface layer formed upon high-dose irradiation of the (111) face of a synthetic diamond with Ar+ ions at an energy of 30 keV and a target temperature of 400°C are presented. It is found that the orienting effect of the diamond lattice is visible in the suppression of the formation of graphite crystallites with axis c perpendicular to the surface. The thickness of the modified layer is 40–50 nm, and its sheet resistance is 0.5 kΩ/sq. Resistivity ρm = 20–25 μΩ m of the modified layer lies within the range of ρ values of graphite and glassy carbon materials.

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Authors and Affiliations

  1. Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, 119991, Russia

    N. N. Andrianova, A. M. Borisov & E. S. Mashkova

  2. MATI–Russian State Technology University, Moscow, 121551, Russia

    N. N. Andrianova, A. M. Borisov & V. A. Kazakov

  3. Keldysh Research Center, Moscow, 125438, Russia

    V. A. Kazakov, R. N. Rizakhanov & S. K. Sigalaev

  4. Sobolev Institute of Geology and Mineralogy, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia

    Yu. N. Palyanov

  5. Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, 603950, Russia

    E. A. Pitirimova

  6. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia

    V. P. Popov

Authors
  1. N. N. Andrianova
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  2. A. M. Borisov
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  3. V. A. Kazakov
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  4. E. S. Mashkova
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  5. Yu. N. Palyanov
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  6. E. A. Pitirimova
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  7. V. P. Popov
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  8. R. N. Rizakhanov
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  9. S. K. Sigalaev
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Corresponding author

Correspondence to A. M. Borisov.

Additional information

Original Russian Text © N.N. Andrianova, A.M. Borisov, V.A. Kazakov, E.S. Mashkova, Yu.N. Palyanov, E.A. Pitirimova, V.P. Popov, R.N. Rizakhanov, S.K. Sigalaev, 2016, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2016, Vol. 80, No. 2, pp. 175–180.

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Andrianova, N.N., Borisov, A.M., Kazakov, V.A. et al. Graphitization of a diamond surface upon high-dose ion bombardment. Bull. Russ. Acad. Sci. Phys. 80, 156–160 (2016). https://doi.org/10.3103/S1062873816020040

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  • DOI: https://doi.org/10.3103/S1062873816020040

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