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Acoustic emissions during the sublimation of a gallium nitride micron layer induced by KrF laser radiation

  • Proceedings of the International Conference “Luminescence and Laser Physics, 2014”
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The efficiency of gallium nitride layer ablation when exposed to pulses of a KrF laser through a layer of sapphire is investigated. The resulting dependences of the evolution of acoustic emission upon varying the laser pulse energy density are of a threshold nature, allowing us to control the efficiency of ablation and the quality of gallium nitride crystals separated from a sapphire substrate.

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Authors and Affiliations

  1. ZAO Scientific Innovation Enterprise TOPAZ, Tomsk, 634021, Russia

    M. E. Levitskiy

  2. Zuev Institute of Atmospheric Optics, Siberian Branch, Russian Academy of Sciences, Tomsk, 634021, Russia

    N. N. Bochkarev & V. G. Sokovikov

Authors
  1. M. E. Levitskiy
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  2. N. N. Bochkarev
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  3. V. G. Sokovikov
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Corresponding author

Correspondence to N. N. Bochkarev.

Additional information

Original Russian Text © M.E. Levitskiy, N.N. Bochkarev, V.G. Sokovikov, 2015, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2015, Vol. 79, No. 2, pp. 270–274.

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Levitskiy, M.E., Bochkarev, N.N. & Sokovikov, V.G. Acoustic emissions during the sublimation of a gallium nitride micron layer induced by KrF laser radiation. Bull. Russ. Acad. Sci. Phys. 79, 246–250 (2015). https://doi.org/10.3103/S106287381502015X

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  • DOI: https://doi.org/10.3103/S106287381502015X

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