Abstract
A computer study of morphological characteristics using AFM images of a self-organized surface nanopore system in the structure of SiO2/Si(100) is performed. The nanopore system is obtained via Zn ion doping with subsequent thermal annealing. AFM images of the nanopore system are studied using the STIMAN 3D software. A correct quantitative estimate is made of the morphology of this nanopore system using a number of parameters (equivalent diameter, area, total area, and shape coefficient). Estimating the morphology of the self-organized surface nanopore system in the structure of SiO2/Si(100) allows us to narrow the possible practical applications of the resulting system in opto- and nanoelectronics.
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Original Russian Text © V.N. Sokolov, O.V. Razgulina, V.V. Privesentsev, D.V. Petrov, 2014, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2014, Vol. 78, No. 9, pp. 1098–1102.
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Sokolov, V.N., Razgulina, O.V., Privesentsev, V.V. et al. Computer analysis of the AFM images of the nanopore system on the SiO2/Si structure surface, obtained by Zn ion implantation. Bull. Russ. Acad. Sci. Phys. 78, 859–863 (2014). https://doi.org/10.3103/S1062873814090287
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DOI: https://doi.org/10.3103/S1062873814090287