Sputtering the surface of a He-Ne laser cathode

  • M. V. Eroshkin
  • G. V. KiselevEmail author
  • E. N. Moos
Proceedings of the 21st International Conference “Ion-Surface Interaction (ISI-2013)”


The results from analyzing the surface of an aluminum cathode by means of atomic force microscopy (AFM) and Auger electron spectroscopy (AES) are presented. Cathode surface sputtering is simulated via the Monte Carlo method using the SRIM program. Factors affecting the formation of the surface relief of cold cathodes under the action of bombarding ions are discussed along with the main mechanisms of surface modification and ways of enhancing the stability of the material with respect to the action of ions.


Atomic Force Microscopy Tilt Angle Auger Electron Spectroscopy Magnesium Aluminate Auger Spectrum 
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© Allerton Press, Inc. 2014

Authors and Affiliations

  1. 1.Ryazan State UniversityRyazanRussia

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