Possibilities of ion-beam diagnostics of thin-film epitaxial and nonoriented structures

  • V. K. EgorovEmail author
  • E. V. Egorov
  • M. S. Afanas’ev
Proceedings of the 21st International Conference “Ion-Surface Interaction (ISI-2013)”


Certain possibilities and features of ion-beam diagnostics of thin-film epitaxial and nonoriented structures are discussed. The main advantage of this technique (its ability to determine the element concentration profile across the target depth of several micrometers without destroying the target and the need to use standards) is illustrated by real examples. A brief description of the Sokol-3 ion-beam analytical complex, a basic tool for the ion-beam sounding of materials, is given.


Energy Step Target Depth Light Charged Particle Rutherford Back Scattering Nonoriented Structure 
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  1. 1.
    Schmidt, B. and Wetzig, K., Ion Beams in Material Processing and Analysis, Wien: Springer, 2013.CrossRefGoogle Scholar
  2. 2.
    Bird, J.R. and Williams, J.S., Ion Beams for Material Analysis, Sydney: Acad. Press, 1989.Google Scholar
  3. 3.
    Kotai, E., Nucl. Instrum. Methods Phys. Res. B, 1994, vol. 85, p. 588.ADSCrossRefGoogle Scholar
  4. 4.
    Rauhala, E., Nucl. Instrum. Methods Phys. Res. B, 1985, vol. 12, p. 447.ADSCrossRefGoogle Scholar
  5. 5.
    Kolyada, V.M., Zaichenko, A.K., and Dmitrienko, R.V., Rentgenospektral’nyi analiz s ionnym vozbuzhdeniem (X-Ray Spectrum Analysis with Ion Excitation), Moscow: Atomizdat, 1978.Google Scholar
  6. 6.
    Johanson, S.A.E. and Campbell, J.L., Pixe: a Novel Technique for Element Analysis, New York: Wiley, 1988.Google Scholar
  7. 7.
    Chernov, I.P. and Shadrin, V.N., Analiz soderzhaniya vodoroda i geliya metodom yader otdachi (Hydrogen and Helium Content Analysis by Means of Nuclei Recoil), Moscow: Energoatomizdat, 1988.Google Scholar
  8. 8.
    Hofsab, H., Forward Recoil Spectrometry, New York: Plenum, 1996.Google Scholar
  9. 9.
    Feldman, L.C., Mayer, J.W., and Picraux, S.T., Material Analysis by Ion Channeling, New York: Academic Press, 1982.Google Scholar
  10. 10.
    Feldman, L.C. and Mayer, J.W., Fundamentals of Surface and Thin Film Analysis, North-Holland, 1986.Google Scholar
  11. 11.
    High Energy Ion Beam Analysis of Solids, Gotz, G. and Gartner, K., Eds., Berlin: Acad.-Verlag, 1988.Google Scholar
  12. 12.
    Egorov, V.K. and Egorov, E.V., Materialy 10 Mezhdunarodnoi nauchno-tekhnicheskoi konferentsii “Vysokie tekhnologii v promyshlennosti Rossii” (Proc. 10th Int. Sci.-Tech. Conf. “High Technologies in Russian Industry”), Moscow: Tekhnomash, 2004, p. 82.Google Scholar
  13. 13.
    Doolittle, L.R., Nucl. Instum. Methods B, 1985, vol. 9, p. 344.ADSCrossRefGoogle Scholar

Copyright information

© Allerton Press, Inc. 2014

Authors and Affiliations

  • V. K. Egorov
    • 1
    Email author
  • E. V. Egorov
    • 1
  • M. S. Afanas’ev
    • 2
  1. 1.Institute of Microelectronics Technology and High-Purity MaterialsRussian Academy of SciencesChernogolovka, Moscow oblastRussia
  2. 2.Kotel’nikov Institute of Radio Engineering and ElectronicsRussian Academy of SciencesFryazino, Moscow oblastRussia

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