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Possibilities of ion-beam diagnostics of thin-film epitaxial and nonoriented structures

  • V. K. EgorovEmail author
  • E. V. Egorov
  • M. S. Afanas’ev
Proceedings of the 21st International Conference “Ion-Surface Interaction (ISI-2013)”
  • 28 Downloads

Abstract

Certain possibilities and features of ion-beam diagnostics of thin-film epitaxial and nonoriented structures are discussed. The main advantage of this technique (its ability to determine the element concentration profile across the target depth of several micrometers without destroying the target and the need to use standards) is illustrated by real examples. A brief description of the Sokol-3 ion-beam analytical complex, a basic tool for the ion-beam sounding of materials, is given.

Keywords

Energy Step Target Depth Light Charged Particle Rutherford Back Scattering Nonoriented Structure 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Allerton Press, Inc. 2014

Authors and Affiliations

  • V. K. Egorov
    • 1
    Email author
  • E. V. Egorov
    • 1
  • M. S. Afanas’ev
    • 2
  1. 1.Institute of Microelectronics Technology and High-Purity MaterialsRussian Academy of SciencesChernogolovka, Moscow oblastRussia
  2. 2.Kotel’nikov Institute of Radio Engineering and ElectronicsRussian Academy of SciencesFryazino, Moscow oblastRussia

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