Advertisement

Precision depth profiling of nanoelectronic structures using secondary molecular ions in secondary-ion mass spectrometry

  • A. N. PustovitEmail author
  • A. F. Vyatkin
Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics
  • 30 Downloads

Abstract

A method for improving SIMS depth profiling by recording secondary molecular ions is proposed. Experimental studies of SiGe and AlGaAs nanometer-scale test structures, and of boron-doped Si with an energy of 5 keV showed improved secondary-ion mass spectroscopy depth resolution when recording secondary molecular ions. A physical model that considers the molecular ion dissociation energy to be a decisive parameter is discussed.

Keywords

Half Height Depth Resolution Atomic Particle Escape Depth Secondary Ionic Emission 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Turner, J.E., Amano, J., Gronet, C.M., and Gibbons, J.F., Appl. Phys. Lett., 1987, vol. 50, no. 22, p. 1601.ADSCrossRefGoogle Scholar
  2. 2.
    Chernov, I.P., Nikitenkov, N.N., Krening, M., and Baumbach, N., Bull. Russ. Acad. Sci. Phys., 2000, vol. 64, no. 11, p. 1732.Google Scholar
  3. 3.
    Rudenko, K., Averkin, S., Lukichev, V., Orlikovsky, A., Pustovit, A., and Vyatkin, A., Proc. SPIE-Int. Soc. Opt. Eng., 2006, vol. 6260, p. 626003–1.Google Scholar
  4. 4.
    Pustovit, A.N. and Vyatkin, A.F., Poverkhn. Rentgen., Sinkhrotr. Neitr. Issl., 2006, no. 10, p. 65.Google Scholar
  5. 5.
    Wittmack, K.W., Sputtering by Particle Bombardment, Behrisch, R. and Wittmack, R.K.W., Eds., Springer-Verlag, 1991; Moscow: Mir, 1998, p. 237.Google Scholar
  6. 6.
    Pustovin, A.N., Bull. Russ. Acad. Sci. Phys., 2004, vol. 68, no. 3, p. 449.Google Scholar
  7. 7.
    Veksler, V.I., Vtorichnaya ionnaya emissiya metallov (Secondary Ionic Emission of Metals), Moscow: Nauka, 1978.Google Scholar
  8. 8.
    Kittel, C., Introduction to Solid State Physics, Wiley, 1953; Moscow: Nauka, 1978.Google Scholar

Copyright information

© Allerton Press, Inc. 2012

Authors and Affiliations

  1. 1.Institute of Microelectronics Technology and High-Purity MaterialsRussian Academy of SciencesChernogolovkaRussia

Personalised recommendations