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Electron beam lithography with a Gaussian current distribution for nanolithography

  • Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The parameters of a system of electron beam lithography with a Gaussian current density distribution are studied. The dependence of resolution on magnification and the ratio of anode potentials are analyzed. A model of a three-electrode electron gun with a ZrO/W cathode is used. Stochastic aberration is taken into account. It is shown that a resolution of 10 nm is obtainable even if an electron gun with the simplest geometry is used.

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References

  1. Melnikov, A.A. and Potapkin, O.D., Bull. Russ. Acad. Sci. Phys., 2010, vol. 74, no. 7, p. 1011.

    Article  Google Scholar 

  2. Der-Shvarts, G.V. and Makarova, I.S., Radiot. Elektr., 1969, no. 14, p. 378.

  3. Orloff, J. and Swanson, L.W., J. Appl. Phys., 1979, vol. 50, no. 4, p. 2494.

    Article  ADS  Google Scholar 

  4. Swanson, L.W. and Schwind, G.A., Handbook of Charged Particle Optics, Orloff, J., New York: CRC Press, 1997.

    Google Scholar 

  5. Piearce-Percy, H., et al., J. Vac. Sci. Tecnol. B, 1997, vol. 15, no. 6, p. 2754.

    Article  Google Scholar 

  6. Veneklasen, L., in Physical Aspects of Electron Microscopy, Siegel, B. and Beaman, D.R., Eds., New York: Wiley, 1975, p. 315.

    Google Scholar 

  7. Hawkes, P.W. and Kasper, E., Principles of Electron Optics, London: Acad. Press, 1989; Moscow: Mir, 1993.

    Google Scholar 

  8. Panteleev, A.V. and Letova, T.A., Metody optimizatsii v primerakh i zadachakh (Optimization Methods in Problems and Examples), Moscow: Vysshaya shkola, 2002.

    Google Scholar 

  9. Press, W.H., Teukolsky, S.A., Vetterling, W.T., and Flannery, B.P., Numerical Recipes in C, Cambridge: Univ. Press, 1992.

    MATH  Google Scholar 

  10. Potapkin, O.D., Proc. SPIE-Int. Soc. Opt. Eng., 2008, vol. 7121, p. 712108.

    Google Scholar 

  11. Rusterholz, A.A., Elektronenoptik, Basel: Birkhauser, 1950; Moscow: Izd. inostr. lit, 1952, p. 46.

    MATH  Google Scholar 

  12. Lenc, M. and Müllerova, I., Ultramicroscopy, 1992, vol. 41, no. 4, p. 411.

    Article  Google Scholar 

  13. Werster, J.L., Philips, Res.Rep., 1963, vol. 18, no. 6, p. 465.

    Google Scholar 

  14. Szilagyi, M., Electron and Ion Optics, New York: Plenum, 1988; Moscow: Mir, 1990.

    Book  Google Scholar 

  15. Jansen, G.H., Coulomb Interactions in Particle Beams, Adv. Electron. Electron Phys., New York: Acad. Press, 1990, suppl. 21.

    Google Scholar 

  16. Kruit, P. and Jansen, G.H., in Handbook of Charged Particle Optics, Orloff, J., Ed., New York: CRC Press, 1997.

    Google Scholar 

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Authors and Affiliations

  1. Moscow State Technical University of Radio Engineering, Electronics, and Automation, Moscow, 119454, Russia

    O. D. Potapkin

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  1. O. D. Potapkin
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Correspondence to O. D. Potapkin.

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Original Russian Text © O.D. Potapkin, 2012, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2012, Vol. 76, No. 9, pp. 1103–1106.

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Potapkin, O.D. Electron beam lithography with a Gaussian current distribution for nanolithography. Bull. Russ. Acad. Sci. Phys. 76, 991–994 (2012). https://doi.org/10.3103/S1062873812090201

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  • DOI: https://doi.org/10.3103/S1062873812090201

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