Analyzing SEM collection efficiency

  • O. D. PotapkinEmail author
  • A. A. Melnikov
Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics


The Dirichlet problem is solved to find the electrostatic field distribution for Everhart-Thornley pair-symmetric detectors placed under the pole piece of an objective lens. The trajectories of backscattered and secondary electrons are calculated numerically. Diagrams of the collection efficiency are plotted for different values of the ratio of working section length to a diameter of the pole piece. The results could be useful in making linear measurements of nanosized structures.


Dirichlet Problem Initial Energy Video Signal Initial Angle Liouville Problem 
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Copyright information

© Allerton Press, Inc. 2012

Authors and Affiliations

  1. 1.Moscow State Technical University of Radio Engineering, Electronics, and AutomationMoscowRussia

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