Advertisement

Bulletin of the Russian Academy of Sciences: Physics

, Volume 76, Issue 9, pp 1002–1004 | Cite as

Investigation of silicon-on-sapphire structures by means of TEM

  • D. A. Pavlov
  • P. A. Shilyaev
  • E. V. Korotkov
  • N. O. KrivulinEmail author
  • A. I. Bobrov
Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics

Abstract

The initial stages of the molecular beam epitaxy (MBE) growth of silicon-on-sapphire (SOS) are investigated via transmission electron microscopy (TEM). The sample preparation procedure is improved to study SOS structures by TEM. It is shown that silicon in the shape of 3D islets can form on a continuous silicon layer grown on sapphire.

Keywords

Molecular Beam Epitaxy Energy Dispersion Spectroscopy High Resolution Transmission Electron Microscopy Silicon Layer High Resolution Transmission Electron Microscopy Image 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Mead, D. and Hine, J., Rep. Progr. Phys., 1987, vol. 8, no. 3, p. 327.Google Scholar
  2. 2.
    Adonin, A., Elektron. Komponenty, 2000, no. 3, p. 6.Google Scholar
  3. 3.
    Twig, M.E., Richmond, E.D., and Pellegrino, J.G., Appl. Phys. Lett., 1989, vol. 54, no. 18, pp. 1766–1768.ADSCrossRefGoogle Scholar
  4. 4.
    Shilyaev, P.A., Pavlov, D.A., Korotkov, E.V., and Treushnikov, M.V., Mater. Elektron. Tekhn., 2008, no. 2, pp. 62–66.Google Scholar
  5. 5.
    Precision Ion Polishing System User’s Guide Revision 3, Gatan, Inc., Nov. 1998.Google Scholar
  6. 6.
    Pavlov, D.A., Shilyaev, P.A., Korotkov, E.V., and Krivulin, N.O., Pis’ma Zh. Tekh. Fiz., 2010, vol. 36, no. 12, pp. 16–22.Google Scholar
  7. 7.
    Müller, C.W., J. Vac. Sci. Technol., 1970, vol. 7, no. 1, p. 147.CrossRefGoogle Scholar

Copyright information

© Allerton Press, Inc. 2012

Authors and Affiliations

  • D. A. Pavlov
    • 1
  • P. A. Shilyaev
    • 1
  • E. V. Korotkov
    • 1
  • N. O. Krivulin
    • 1
    Email author
  • A. I. Bobrov
    • 1
  1. 1.Lobachevsky State UniversityNizhni NovgorodRussia

Personalised recommendations