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Allowing for matrix effects in local electron-probe analysis using a new model of the distribution function for the depth of characteristic X-ray radiation

  • N. N. MikheevEmail author
  • M. A. Stepovich
  • E. V. Shirokova
Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics

Abstract

The results from using a new distribution function for the depth of characteristic X-ray radiation φ(ρz) to calculate the allowance for absorption f(χ) in quantitative electron-probe microanalysis are presented. The integral φ(ρz) over ρz in the region of generation is proportional to the normalized absorbed energy value of the electron beam in a sample. This is used to calculate the backscattering factor R.

Keywords

Inelastic Scattering Primary Electron Atomic Shell High Atomic Number Ionization Energy Loss 
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Copyright information

© Allerton Press, Inc. 2012

Authors and Affiliations

  • N. N. Mikheev
    • 1
    Email author
  • M. A. Stepovich
    • 2
  • E. V. Shirokova
    • 2
  1. 1.Shubnikov Institute of Crystallography, Space Materials Sciences Research CenterRussian Academy of SciencesKalugaRussia
  2. 2.Kaluga State UniversityKalugaRussia

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