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Prospects for using cathodoluminescence in SEM to study the distribution and types of breakdown in glass insulators

  • Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

A method for detecting dielectric breakdown in the signal of cathodoluminescence in SEM is compared with both capacitive and secondary-emission methods. In the investigated samples of glass dielectrics, breakdowns of two types are found: surface and emission. The prospects for using cathodoluminescence to detect and localize defects in insulators that lower the breakdown voltage are discussed.

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Authors and Affiliations

  1. Faculty of Physics, Moscow State University, Moscow, 119991, Russia

    A. V. Kuz’menkov, P. V. Ivannikov & A. I. Gabel’chenko

Authors
  1. A. V. Kuz’menkov
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  2. P. V. Ivannikov
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  3. A. I. Gabel’chenko
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Correspondence to A. V. Kuz’menkov.

Additional information

Original Russian Text © A.V. Kuz’menkov, P.V. Ivannikov, A.I. Gabel’chenko, 2012, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2012, Vol. 76, No. 9, pp. 1090–1094.

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Kuz’menkov, A.V., Ivannikov, P.V. & Gabel’chenko, A.I. Prospects for using cathodoluminescence in SEM to study the distribution and types of breakdown in glass insulators. Bull. Russ. Acad. Sci. Phys. 76, 978–982 (2012). https://doi.org/10.3103/S1062873812090110

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  • DOI: https://doi.org/10.3103/S1062873812090110

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