Prospects for using cathodoluminescence in SEM to study the distribution and types of breakdown in glass insulators

  • A. V. Kuz’menkovEmail author
  • P. V. Ivannikov
  • A. I. Gabel’chenko
Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics


A method for detecting dielectric breakdown in the signal of cathodoluminescence in SEM is compared with both capacitive and secondary-emission methods. In the investigated samples of glass dielectrics, breakdowns of two types are found: surface and emission. The prospects for using cathodoluminescence to detect and localize defects in insulators that lower the breakdown voltage are discussed.


Surface Potential Breakdown Voltage Scan Ning Electron Microscope Dielectric Breakdown Glass Insulator 
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© Allerton Press, Inc. 2012

Authors and Affiliations

  • A. V. Kuz’menkov
    • 1
    Email author
  • P. V. Ivannikov
    • 1
  • A. I. Gabel’chenko
    • 1
  1. 1.Faculty of PhysicsMoscow State UniversityMoscowRussia

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